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Title: Microelectromechanical ratcheting apparatus

Abstract

A microelectromechanical (MEM) ratcheting apparatus is disclosed which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack. Motion is effected by one or more reciprocating pawls driven by the actuator in a direction that is parallel to, in line with, or tangential to the path. The reciprocating pawls engage indexing elements (e.g. teeth or pins) on the moveable member to incrementally move the member along a curved or straight path with the ability to precisely control and determine the position of the moveable member. The MEM apparatus can be formed on a silicon substrate by conventional surface micromachining methods.

Inventors:
 [1];  [1];  [1];  [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
873650
Patent Number(s):
6211599
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
F - MECHANICAL ENGINEERING F03 - MACHINES OR ENGINES FOR LIQUIDS F03G - SPRING, WEIGHT, INERTIA OR LIKE MOTORS
H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
microelectromechanical; ratcheting; apparatus; disclosed; electrostatic; thermal; actuator; drives; moveable; form; gear; stage; rack; motion; effected; reciprocating; pawls; driven; direction; parallel; line; tangential; path; engage; indexing; elements; teeth; pins; incrementally; move; curved; straight; ability; precisely; control; determine; position; formed; silicon; substrate; conventional; surface; micromachining; methods; silicon substrate; surface micromachining; thermal actuator; ratcheting apparatus; micromachining method; precisely control; machining method; /310/74/

Citation Formats

Barnes, Stephen M, Miller, Samuel L, Jensen, Brian D, Rodgers, M Steven, and Burg, Michael S. Microelectromechanical ratcheting apparatus. United States: N. p., 2001. Web.
Barnes, Stephen M, Miller, Samuel L, Jensen, Brian D, Rodgers, M Steven, & Burg, Michael S. Microelectromechanical ratcheting apparatus. United States.
Barnes, Stephen M, Miller, Samuel L, Jensen, Brian D, Rodgers, M Steven, and Burg, Michael S. Mon . "Microelectromechanical ratcheting apparatus". United States. https://www.osti.gov/servlets/purl/873650.
@article{osti_873650,
title = {Microelectromechanical ratcheting apparatus},
author = {Barnes, Stephen M and Miller, Samuel L and Jensen, Brian D and Rodgers, M Steven and Burg, Michael S},
abstractNote = {A microelectromechanical (MEM) ratcheting apparatus is disclosed which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack. Motion is effected by one or more reciprocating pawls driven by the actuator in a direction that is parallel to, in line with, or tangential to the path. The reciprocating pawls engage indexing elements (e.g. teeth or pins) on the moveable member to incrementally move the member along a curved or straight path with the ability to precisely control and determine the position of the moveable member. The MEM apparatus can be formed on a silicon substrate by conventional surface micromachining methods.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

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Works referenced in this record:

Correspondence
journal, December 1997


Surface Micromachined Polysilicon Theraml Actuator Arrays and Applications
conference, June 1996