All-alkoxide synthesis of strontium-containing metal oxides

Boyle, Timothy J

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Title: All-alkoxide synthesis of strontium-containing metal oxides

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Abstract

A method for making strontium-containing metal-oxide ceramic thin films from a precursor liquid by mixing a strontium neo-pentoxide dissolved in an amine solvent and at least one metal alkoxide dissolved in a solvent, said at least one metal alkoxide selected from the group consisting of alkoxides of calcium, barium, bismuth, cadmium, lead, titanium, tantalum, hafnium, tungsten, niobium, zirconium, yttrium, lanthanum, antimony, chromium and thallium, depositing a thin film of the precursor liquid on a substrate, and heating the thin film in the presence of oxygen at between 550 and 700.degree. C.

Inventors:

Boyle, Timothy J ^[1]

Albuquerque, NM

Issue Date:: 2001-01-01

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

OSTI Identifier:: 873642

Patent Number(s):: 6210752

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C18/1208 - {Oxides, e.g. ceramics}
C23C18/1225 - {Deposition of multilayers of inorganic material}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/02197 - {the material having a perovskite structure, e.g. BaTiO3}
H01L21/02205 - {the layer being characterised by the precursor material for deposition}
H01L21/02282 - {liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating}
H01L21/02337 - {treatment by exposure to a gas or vapour}
H01L21/31691 - {with perovskite structure}

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: all-alkoxide; synthesis; strontium-containing; metal; oxides; method; metal-oxide; ceramic; films; precursor; liquid; mixing; strontium; neo-pentoxide; dissolved; amine; solvent; alkoxide; selected; consisting; alkoxides; calcium; barium; bismuth; cadmium; lead; titanium; tantalum; hafnium; tungsten; niobium; zirconium; yttrium; lanthanum; antimony; chromium; thallium; depositing; film; substrate; heating; presence; oxygen; 550; 700; degree; metal alkoxide; metal oxide; metal oxides; oxide ceramic; containing metal; oxide selected; metal-oxide ceramic; oxide dissolved; strontium-containing metal; /427/

Citation Formats


                    Boyle, Timothy J. All-alkoxide synthesis of strontium-containing metal oxides.  United States: N. p., 2001. 
        Web.

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                    Boyle, Timothy J. All-alkoxide synthesis of strontium-containing metal oxides.  United States.

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                    Boyle, Timothy J. Mon .  
        "All-alkoxide synthesis of strontium-containing metal oxides".  United States.  https://www.osti.gov/servlets/purl/873642.

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@article{osti_873642,

  title        = {All-alkoxide synthesis of strontium-containing metal oxides},

  author       = {Boyle, Timothy J},

  abstractNote = {A method for making strontium-containing metal-oxide ceramic thin films from a precursor liquid by mixing a strontium neo-pentoxide dissolved in an amine solvent and at least one metal alkoxide dissolved in a solvent, said at least one metal alkoxide selected from the group consisting of alkoxides of calcium, barium, bismuth, cadmium, lead, titanium, tantalum, hafnium, tungsten, niobium, zirconium, yttrium, lanthanum, antimony, chromium and thallium, depositing a thin film of the precursor liquid on a substrate, and heating the thin film in the presence of oxygen at between 550 and 700.degree. C.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2001},

  month        = {1}

}

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