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Title: Pedestal substrate for coated optics

Abstract

A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface figure changes caused by optical coatings to be primarily spherical in nature. The pedestal optical substrate includes a disk-like optic or substrate section having a top surface that is coated, a disk-like base section that provides location at which the substrate can be mounted, and a connecting cylindrical section between the base and optics or substrate sections. The connecting cylindrical section may be attached via three spaced legs or members. However, the pedestal optical substrate can be manufactured from a solid piece of material to form a monolith, thus avoiding joints between the sections, or the disk-like base can be formed separately and connected to the connecting section. By way of example, the pedestal optical substrate may be utilized in the fabrication of optics for an extreme ultraviolet (EUV) lithography imaging system, or in any optical system requiring coated optics and substrates with reduced sensitivity to mechanical mounts.

Inventors:
 [1];  [2];  [3]
  1. Livermore, CA
  2. Tracy, CA
  3. Concord, NC
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
873622
Patent Number(s):
6206966
Assignee:
Regents of University of California (Oakland, CA)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
pedestal; substrate; coated; optics; optical; simultaneously; provides; dynamic; stiffness; surface; figure; sensitivity; mechanical; mounting; hardware; inputs; constrains; changes; caused; coatings; primarily; spherical; nature; disk-like; optic; section; top; base; location; mounted; connecting; cylindrical; sections; attached; via; spaced; legs; manufactured; solid; piece; material; form; monolith; avoiding; joints; formed; separately; connected; example; utilized; fabrication; extreme; ultraviolet; euv; lithography; imaging; requiring; substrates; reduced; mounts; surface figure; cylindrical section; top surface; extreme ultraviolet; pedestal optical; optical substrate; reduced sensitivity; mounting hardware; simultaneously provides; simultaneously provide; changes caused; optical coatings; attached via; base section; coated optics; mechanical mounting; optical coating; substrate dynamic; hardware inputs; figure changes; figure sensitivity; dynamic stiffness; constrains surface; /118/

Citation Formats

Hale, Layton C, Malsbury, Terry N, and Patterson, Steven R. Pedestal substrate for coated optics. United States: N. p., 2001. Web.
Hale, Layton C, Malsbury, Terry N, & Patterson, Steven R. Pedestal substrate for coated optics. United States.
Hale, Layton C, Malsbury, Terry N, and Patterson, Steven R. Mon . "Pedestal substrate for coated optics". United States. https://www.osti.gov/servlets/purl/873622.
@article{osti_873622,
title = {Pedestal substrate for coated optics},
author = {Hale, Layton C and Malsbury, Terry N and Patterson, Steven R},
abstractNote = {A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface figure changes caused by optical coatings to be primarily spherical in nature. The pedestal optical substrate includes a disk-like optic or substrate section having a top surface that is coated, a disk-like base section that provides location at which the substrate can be mounted, and a connecting cylindrical section between the base and optics or substrate sections. The connecting cylindrical section may be attached via three spaced legs or members. However, the pedestal optical substrate can be manufactured from a solid piece of material to form a monolith, thus avoiding joints between the sections, or the disk-like base can be formed separately and connected to the connecting section. By way of example, the pedestal optical substrate may be utilized in the fabrication of optics for an extreme ultraviolet (EUV) lithography imaging system, or in any optical system requiring coated optics and substrates with reduced sensitivity to mechanical mounts.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}