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Title: Surface figure control for coated optics

Abstract

A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface figure changes caused by optical coatings to be primarily spherical in nature. The pedestal optical substrate includes a disk-like optic or substrate section having a top surface that is coated, a disk-like base section that provides location at which the substrate can be mounted, and a connecting cylindrical section between the base and optics or substrate sections. The optic section has an optical section thickness.sup.2 /optical section diameter ratio of between about 5 to 10 mm, and a thickness variation between front and back surfaces of less than about 10%. The connecting cylindrical section may be attached via three spaced legs or members. However, the pedestal optical substrate can be manufactured from a solid piece of material to form a monolith, thus avoiding joints between the sections, or the disk-like base can be formed separately and connected to the connecting section. By way of example, the pedestal optical substrate may be utilized in the fabrication of optics for an extreme ultraviolet (EUV) lithography imaging system, or in any optical system requiring coated optics and substrates withmore » reduced sensitivity to mechanical mounts.« less

Inventors:
 [1];  [2];  [1]
  1. Livermore, CA
  2. Pleasanton, CA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
873621
Patent Number(s):
6206528
Assignee:
EUV LLC (Santa Clara, CA)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-76
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
surface; figure; control; coated; optics; pedestal; optical; substrate; simultaneously; provides; dynamic; stiffness; sensitivity; mechanical; mounting; hardware; inputs; constrains; changes; caused; coatings; primarily; spherical; nature; disk-like; optic; section; top; base; location; mounted; connecting; cylindrical; sections; thickness; diameter; ratio; 10; variation; front; surfaces; attached; via; spaced; legs; manufactured; solid; piece; material; form; monolith; avoiding; joints; formed; separately; connected; example; utilized; fabrication; extreme; ultraviolet; euv; lithography; imaging; requiring; substrates; reduced; mounts; surface figure; cylindrical section; top surface; extreme ultraviolet; pedestal optical; optical substrate; reduced sensitivity; mounting hardware; simultaneously provides; simultaneously provide; changes caused; optical coatings; diameter ratio; attached via; base section; coated optics; mechanical mounting; optical coating; substrate dynamic; thickness variation; hardware inputs; figure changes; figure sensitivity; dynamic stiffness; constrains surface; /359/

Citation Formats

Ray-Chaudhuri, Avijit K, Spence, Paul A, and Kanouff, Michael P. Surface figure control for coated optics. United States: N. p., 2001. Web.
Ray-Chaudhuri, Avijit K, Spence, Paul A, & Kanouff, Michael P. Surface figure control for coated optics. United States.
Ray-Chaudhuri, Avijit K, Spence, Paul A, and Kanouff, Michael P. Mon . "Surface figure control for coated optics". United States. https://www.osti.gov/servlets/purl/873621.
@article{osti_873621,
title = {Surface figure control for coated optics},
author = {Ray-Chaudhuri, Avijit K and Spence, Paul A and Kanouff, Michael P},
abstractNote = {A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface figure changes caused by optical coatings to be primarily spherical in nature. The pedestal optical substrate includes a disk-like optic or substrate section having a top surface that is coated, a disk-like base section that provides location at which the substrate can be mounted, and a connecting cylindrical section between the base and optics or substrate sections. The optic section has an optical section thickness.sup.2 /optical section diameter ratio of between about 5 to 10 mm, and a thickness variation between front and back surfaces of less than about 10%. The connecting cylindrical section may be attached via three spaced legs or members. However, the pedestal optical substrate can be manufactured from a solid piece of material to form a monolith, thus avoiding joints between the sections, or the disk-like base can be formed separately and connected to the connecting section. By way of example, the pedestal optical substrate may be utilized in the fabrication of optics for an extreme ultraviolet (EUV) lithography imaging system, or in any optical system requiring coated optics and substrates with reduced sensitivity to mechanical mounts.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}