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Title: Method for vacuum fusion bonding

Abstract

An improved vacuum fusion bonding structure and process for aligned bonding of large area glass plates, patterned with microchannels and access holes and slots, for elevated glass fusion temperatures. Vacuum pumpout of all components is through the bottom platform which yields an untouched, defect free top surface which greatly improves optical access through this smooth surface. Also, a completely non-adherent interlayer, such as graphite, with alignment and location features is located between the main steel platform and the glass plate pair, which makes large improvements in quality, yield, and ease of use, and enables aligned bonding of very large glass structures.

Inventors:
 [1];  [2];  [2];  [3]
  1. (Sunnyvale, CA)
  2. (Livermore, CA)
  3. (Stockton, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
873620
Patent Number(s):
6205819
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; vacuum; fusion; bonding; improved; structure; process; aligned; glass; plates; patterned; microchannels; access; holes; slots; elevated; temperatures; pumpout; components; bottom; platform; yields; untouched; defect; free; top; surface; greatly; improves; optical; smooth; completely; non-adherent; interlayer; graphite; alignment; location; features; located; main; steel; plate; pair; makes; improvements; quality; yield; ease; enables; structures; vacuum pumpout; vacuum fusion; defect free; optical access; smooth surface; top surface; glass plates; vacuum pump; fusion bonding; glass plate; aligned bonding; greatly improves; glass structures; improved vacuum; glass fusion; fusion bond; fusion temperatures; elevated glass; access holes; bonding structure; /65/156/264/

Citation Formats

Ackler, Harold D., Swierkowski, Stefan P., Tarte, Lisa A., and Hicks, Randall K. Method for vacuum fusion bonding. United States: N. p., 2001. Web.
Ackler, Harold D., Swierkowski, Stefan P., Tarte, Lisa A., & Hicks, Randall K. Method for vacuum fusion bonding. United States.
Ackler, Harold D., Swierkowski, Stefan P., Tarte, Lisa A., and Hicks, Randall K. Mon . "Method for vacuum fusion bonding". United States. https://www.osti.gov/servlets/purl/873620.
@article{osti_873620,
title = {Method for vacuum fusion bonding},
author = {Ackler, Harold D. and Swierkowski, Stefan P. and Tarte, Lisa A. and Hicks, Randall K.},
abstractNote = {An improved vacuum fusion bonding structure and process for aligned bonding of large area glass plates, patterned with microchannels and access holes and slots, for elevated glass fusion temperatures. Vacuum pumpout of all components is through the bottom platform which yields an untouched, defect free top surface which greatly improves optical access through this smooth surface. Also, a completely non-adherent interlayer, such as graphite, with alignment and location features is located between the main steel platform and the glass plate pair, which makes large improvements in quality, yield, and ease of use, and enables aligned bonding of very large glass structures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

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