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Title: Phase-shifting point diffraction interferometer grating designs

Abstract

In a phase-shifting point diffraction interferometer, by sending the zeroth-order diffraction to the reference pinhole of the mask and the first-order diffraction to the test beam window of the mask, the test and reference beam intensities can be balanced and the fringe contrast improved. Additionally, using a duty cycle of the diffraction grating other than 50%, the fringe contrast can also be improved.

Inventors:
 [1];  [2];  [3]
  1. (Oakland, CA)
  2. (Berkeley, CA)
  3. (San Carlos, CA)
Issue Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
OSTI Identifier:
873581
Patent Number(s):
6195169
Assignee:
Regents of University of California (Oakland, CA) LBNL
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
phase-shifting; diffraction; interferometer; grating; designs; sending; zeroth-order; reference; pinhole; mask; first-order; beam; window; intensities; balanced; fringe; contrast; improved; additionally; duty; cycle; 50; diffraction interferometer; reference beam; diffraction grating; duty cycle; reference pinhole; beam window; fringe contrast; zeroth-order diffraction; grating designs; first-order diffraction; /356/

Citation Formats

Naulleau, Patrick, Goldberg, Kenneth Alan, and Tejnil, Edita. Phase-shifting point diffraction interferometer grating designs. United States: N. p., 2001. Web.
Naulleau, Patrick, Goldberg, Kenneth Alan, & Tejnil, Edita. Phase-shifting point diffraction interferometer grating designs. United States.
Naulleau, Patrick, Goldberg, Kenneth Alan, and Tejnil, Edita. Mon . "Phase-shifting point diffraction interferometer grating designs". United States. https://www.osti.gov/servlets/purl/873581.
@article{osti_873581,
title = {Phase-shifting point diffraction interferometer grating designs},
author = {Naulleau, Patrick and Goldberg, Kenneth Alan and Tejnil, Edita},
abstractNote = {In a phase-shifting point diffraction interferometer, by sending the zeroth-order diffraction to the reference pinhole of the mask and the first-order diffraction to the test beam window of the mask, the test and reference beam intensities can be balanced and the fringe contrast improved. Additionally, using a duty cycle of the diffraction grating other than 50%, the fringe contrast can also be improved.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Patent:

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