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Title: Module bay with directed flow

A module bay requires less cleanroom airflow. A shaped gas inlet passage can allow cleanroom air into the module bay with flow velocity preferentially directed toward contaminant rich portions of a processing module in the module bay. Preferential gas flow direction can more efficiently purge contaminants from appropriate portions of the module bay, allowing a reduced cleanroom air flow rate for contaminant removal. A shelf extending from an air inlet slit in one wall of a module bay can direct air flowing therethrough toward contaminant-rich portions of the module bay, such as a junction between a lid and base of a processing module.
Inventors:
 [1]
  1. (Albuquerque, NM)
Issue Date:
OSTI Identifier:
873576
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
Patent Number(s):
US 6193601
Application Number:
09/190048
Contract Number:
AC04-94AL85000
Research Org:
Sandia Corporation
Country of Publication:
United States
Language:
English
Subject:
module; bay; directed; flow; requires; cleanroom; airflow; shaped; gas; inlet; passage; allow; air; velocity; preferentially; contaminant; rich; portions; processing; preferential; direction; efficiently; purge; contaminants; appropriate; allowing; reduced; rate; removal; shelf; extending; slit; wall; direct; flowing; therethrough; contaminant-rich; junction; lid; base; air flowing; module bay; cleanroom air; contaminant removal; flow direction; gas inlet; gas flow; flow rate; air flow; air inlet; flow velocity; flowing therethrough; inlet passage; shaped gas; reduced cleanroom; processing module; directed flow; /454/55/