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Title: Module bay with directed flow

Abstract

A module bay requires less cleanroom airflow. A shaped gas inlet passage can allow cleanroom air into the module bay with flow velocity preferentially directed toward contaminant rich portions of a processing module in the module bay. Preferential gas flow direction can more efficiently purge contaminants from appropriate portions of the module bay, allowing a reduced cleanroom air flow rate for contaminant removal. A shelf extending from an air inlet slit in one wall of a module bay can direct air flowing therethrough toward contaminant-rich portions of the module bay, such as a junction between a lid and base of a processing module.

Inventors:
 [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
873576
Patent Number(s):
6193601
Application Number:
09/190048
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
module; bay; directed; flow; requires; cleanroom; airflow; shaped; gas; inlet; passage; allow; air; velocity; preferentially; contaminant; rich; portions; processing; preferential; direction; efficiently; purge; contaminants; appropriate; allowing; reduced; rate; removal; shelf; extending; slit; wall; direct; flowing; therethrough; contaminant-rich; junction; lid; base; air flowing; module bay; cleanroom air; contaminant removal; flow direction; gas inlet; gas flow; flow rate; air flow; air inlet; flow velocity; flowing therethrough; inlet passage; shaped gas; reduced cleanroom; processing module; directed flow; /454/55/

Citation Formats

Torczynski, John R. Module bay with directed flow. United States: N. p., 2001. Web.
Torczynski, John R. Module bay with directed flow. United States.
Torczynski, John R. Tue . "Module bay with directed flow". United States. https://www.osti.gov/servlets/purl/873576.
@article{osti_873576,
title = {Module bay with directed flow},
author = {Torczynski, John R},
abstractNote = {A module bay requires less cleanroom airflow. A shaped gas inlet passage can allow cleanroom air into the module bay with flow velocity preferentially directed toward contaminant rich portions of a processing module in the module bay. Preferential gas flow direction can more efficiently purge contaminants from appropriate portions of the module bay, allowing a reduced cleanroom air flow rate for contaminant removal. A shelf extending from an air inlet slit in one wall of a module bay can direct air flowing therethrough toward contaminant-rich portions of the module bay, such as a junction between a lid and base of a processing module.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {2}
}

Patent:

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