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Title: Apparatus and method for the determination of grain size in thin films

Abstract

A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.

Inventors:
 [1]
  1. (Barrington, RI)
Issue Date:
Research Org.:
Brown University
OSTI Identifier:
873571
Patent Number(s):
6191855
Assignee:
Brown University Research Foundation (Providence, RI) CHO
DOE Contract Number:  
FG02-86ER45267
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
apparatus; method; determination; grain; size; films; film; sample; comprising; steps; measuring; changes; optical; response; comparing; attenuation; propagating; disturbance; associating; change; time; delayed; time delay; optical response; grain size; sample comprising; film sample; /356/

Citation Formats

Maris, Humphrey J. Apparatus and method for the determination of grain size in thin films. United States: N. p., 2001. Web.
Maris, Humphrey J. Apparatus and method for the determination of grain size in thin films. United States.
Maris, Humphrey J. Mon . "Apparatus and method for the determination of grain size in thin films". United States. https://www.osti.gov/servlets/purl/873571.
@article{osti_873571,
title = {Apparatus and method for the determination of grain size in thin films},
author = {Maris, Humphrey J},
abstractNote = {A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

Patent:

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