Apparatus and method for the determination of grain size in thin films
Abstract
A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.
- Inventors:
-
- Barrington, RI
- Issue Date:
- Research Org.:
- Brown Univ., Providence, RI (United States)
- OSTI Identifier:
- 873571
- Patent Number(s):
- 6191855
- Assignee:
- Brown University Research Foundation (Providence, RI)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- FG02-86ER45267
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- apparatus; method; determination; grain; size; films; film; sample; comprising; steps; measuring; changes; optical; response; comparing; attenuation; propagating; disturbance; associating; change; time; delayed; time delay; optical response; grain size; sample comprising; film sample; /356/
Citation Formats
Maris, Humphrey J. Apparatus and method for the determination of grain size in thin films. United States: N. p., 2001.
Web.
Maris, Humphrey J. Apparatus and method for the determination of grain size in thin films. United States.
Maris, Humphrey J. Mon .
"Apparatus and method for the determination of grain size in thin films". United States. https://www.osti.gov/servlets/purl/873571.
@article{osti_873571,
title = {Apparatus and method for the determination of grain size in thin films},
author = {Maris, Humphrey J},
abstractNote = {A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}
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