Title: Apparatus and method for the determination of grain size in thin films

Abstract

A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.

Inventors:

Maris, Humphrey J ^[1]

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1. Barrington, RI

Issue Date:

2001-01-01

Research Org.:

Brown Univ., Providence, RI (United States)

OSTI Identifier:

873571

Patent Number(s):

6191855

Assignee:

Brown University Research Foundation (Providence, RI)

Patent Classifications (CPCs):

G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

G01B11/303 - {using photoelectric detection means}
G01B21/085 - {using thermal means}

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N21/171 - {with calorimetric detection, e.g. with thermal lens detection}

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DOE Contract Number:  

FG02-86ER45267

Resource Type:

Patent

Country of Publication:

United States

Language:

English

Subject:

apparatus; method; determination; grain; size; films; film; sample; comprising; steps; measuring; changes; optical; response; comparing; attenuation; propagating; disturbance; associating; change; time; delayed; time delay; optical response; grain size; sample comprising; film sample; /356/