Light weight high-stiffness stage platen
Abstract
An improved light weight, stiff stage platen for photolithography is provided. The high stiffness of the stage platen is exemplified by a relatively high first resonant vibrational mode as determined, for instance, by finite element modal analysis. The stage platen can be employed to support a chuck that is designed to secure a mask or wafer. The stage platen includes a frame that has interior walls that define an interior region and that has exterior walls wherein the outer surfaces of at least two adjacent walls are reflective mirror surfaces; and a matrix of ribs within the interior region that is connected to the interior walls wherein the stage platen exhibits a first vibrational mode at a frequency of greater than about 1000 Hz.
- Inventors:
-
- Pleasanton, CA
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 873553
- Patent Number(s):
- 6188150
- Assignee:
- EUV, LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23Q - DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- light; weight; high-stiffness; stage; platen; improved; stiff; photolithography; provided; stiffness; exemplified; relatively; resonant; vibrational; mode; determined; instance; finite; element; modal; analysis; employed; support; chuck; designed; secure; mask; wafer; frame; interior; walls; define; region; exterior; outer; surfaces; adjacent; reflective; mirror; matrix; ribs; connected; exhibits; frequency; 1000; hz; stage platen; mirror surfaces; interior walls; finite element; adjacent wall; interior wall; light weight; outer surfaces; outer surface; mirror surface; vibrational mode; exterior wall; interior region; reflective mirror; improved light; /310/33/414/
Citation Formats
Spence, Paul A. Light weight high-stiffness stage platen. United States: N. p., 2001.
Web.
Spence, Paul A. Light weight high-stiffness stage platen. United States.
Spence, Paul A. Mon .
"Light weight high-stiffness stage platen". United States. https://www.osti.gov/servlets/purl/873553.
@article{osti_873553,
title = {Light weight high-stiffness stage platen},
author = {Spence, Paul A},
abstractNote = {An improved light weight, stiff stage platen for photolithography is provided. The high stiffness of the stage platen is exemplified by a relatively high first resonant vibrational mode as determined, for instance, by finite element modal analysis. The stage platen can be employed to support a chuck that is designed to secure a mask or wafer. The stage platen includes a frame that has interior walls that define an interior region and that has exterior walls wherein the outer surfaces of at least two adjacent walls are reflective mirror surfaces; and a matrix of ribs within the interior region that is connected to the interior walls wherein the stage platen exhibits a first vibrational mode at a frequency of greater than about 1000 Hz.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}