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Title: Compliant displacement-multiplying apparatus for microelectromechanical systems

Abstract

A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 .mu.m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 .mu.m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.

Inventors:
 [1];  [2];  [3]
  1. 9391 Quail Ridge Run, Brighton, MI 48114
  2. 12216 Papaya Ct., NE., Albuquerque, NM 87111
  3. 818 S. Gammon, Apartment 4, Madison, WI 53719
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
873499
Patent Number(s):
6175170
Assignee:
Kota, Sridhar (9391 Quail Ridge Run, Brighton, MI 48114);Rodgers, M. Steven (12216 Papaya Ct., NE., Albuquerque, NM 87111);Hetrick, Joel A. (818 S. Gammon, Apartment 4, Madison, WI 53719)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
compliant; displacement-multiplying; apparatus; microelectromechanical; systems; pivotless; structure; disclosed; increase; geometric; advantage; mechanical; actuator; electrostatic; comb; capacitive-plate; thermal; based; combination; interconnected; flexible; beams; cross-beams; formed; layers; polysilicon; silicon; nitride; provide; 60; multiply; 25-3; displacement; provided; short-stroke; generate; stroke; 10-34; operate; ratchet-driven; device; microengine; play; conventional; devices; lever; arms; pivoting; joints; expected; reliable; associated; common; substrate; surface; micromachining; mechanical advantage; common substrate; electrostatic comb; silicon nitride; surface micromachining; thermal actuator; flexible beam; comb actuator; mechanical systems; pivoting joint; lever arm; /310/

Citation Formats

Kota, Sridhar, Rodgers, M Steven, and Hetrick, Joel A. Compliant displacement-multiplying apparatus for microelectromechanical systems. United States: N. p., 2001. Web.
Kota, Sridhar, Rodgers, M Steven, & Hetrick, Joel A. Compliant displacement-multiplying apparatus for microelectromechanical systems. United States.
Kota, Sridhar, Rodgers, M Steven, and Hetrick, Joel A. Mon . "Compliant displacement-multiplying apparatus for microelectromechanical systems". United States. https://www.osti.gov/servlets/purl/873499.
@article{osti_873499,
title = {Compliant displacement-multiplying apparatus for microelectromechanical systems},
author = {Kota, Sridhar and Rodgers, M Steven and Hetrick, Joel A},
abstractNote = {A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 .mu.m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 .mu.m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

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Works referenced in this record:

Size and Shape Optimization of Compliant Mechanisms: An Efficiency Formulation
conference, February 2021


Topological Synthesis of Compliant Mechanisms Using Multi-Criteria Optimization
journal, June 1997


A Methodical Approach to the Design of Compliant Micromechanisms
conference, June 1994


The Role of Compliance in the Design of MEMS
conference, February 2021

  • Ananthasuresh, G. K.; Kota, Sridhar
  • ASME 1996 Design Engineering Technical Conferences and Computers in Engineering Conference, Volume 1: Design for Manufacturing Conference
  • https://doi.org/10.1115/96-DETC/DFM-1309