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Title: Compliant displacement-multiplying apparatus for microelectromechanical systems

Abstract

A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 .mu.m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 .mu.m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.

Inventors:
 [1];  [2];  [3]
  1. (9391 Quail Ridge Run, Brighton, MI 48114)
  2. (12216 Papaya Ct., NE., Albuquerque, NM 87111)
  3. (818 S. Gammon, Apartment 4, Madison, WI 53719)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
873499
Patent Number(s):
6175170
Assignee:
Kota, Sridhar (9391 Quail Ridge Run, Brighton, MI 48114);Rodgers, M. Steven (12216 Papaya Ct., NE., Albuquerque, NM 87111);Hetrick, Joel A. (818 S. Gammon, Apartment 4, Madison, WI 53719) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
compliant; displacement-multiplying; apparatus; microelectromechanical; systems; pivotless; structure; disclosed; increase; geometric; advantage; mechanical; actuator; electrostatic; comb; capacitive-plate; thermal; based; combination; interconnected; flexible; beams; cross-beams; formed; layers; polysilicon; silicon; nitride; provide; 60; multiply; 25-3; displacement; provided; short-stroke; generate; stroke; 10-34; operate; ratchet-driven; device; microengine; play; conventional; devices; lever; arms; pivoting; joints; expected; reliable; associated; common; substrate; surface; micromachining; mechanical advantage; common substrate; electrostatic comb; silicon nitride; surface micromachining; thermal actuator; flexible beam; comb actuator; mechanical systems; pivoting joint; lever arm; /310/

Citation Formats

Kota, Sridhar, Rodgers, M. Steven, and Hetrick, Joel A. Compliant displacement-multiplying apparatus for microelectromechanical systems. United States: N. p., 2001. Web.
Kota, Sridhar, Rodgers, M. Steven, & Hetrick, Joel A. Compliant displacement-multiplying apparatus for microelectromechanical systems. United States.
Kota, Sridhar, Rodgers, M. Steven, and Hetrick, Joel A. Mon . "Compliant displacement-multiplying apparatus for microelectromechanical systems". United States. https://www.osti.gov/servlets/purl/873499.
@article{osti_873499,
title = {Compliant displacement-multiplying apparatus for microelectromechanical systems},
author = {Kota, Sridhar and Rodgers, M. Steven and Hetrick, Joel A.},
abstractNote = {A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 .mu.m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 .mu.m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {1}
}

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