Title: Compliant displacement-multiplying apparatus for microelectromechanical systems

Abstract

A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 .mu.m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 .mu.m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.

Inventors:

Kota, Sridhar ^[1]; Rodgers, M Steven ^[2]; Hetrick, Joel A ^[3]

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+ Show Inventor Affiliations

1. 9391 Quail Ridge Run, Brighton, MI 48114
2. 12216 Papaya Ct., NE., Albuquerque, NM 87111
3. 818 S. Gammon, Apartment 4, Madison, WI 53719

Issue Date:

2001-01-01

Research Org.:

Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

OSTI Identifier:

873499

Patent Number(s):

6175170

Assignee:

Kota, Sridhar (9391 Quail Ridge Run, Brighton, MI 48114);Rodgers, M. Steven (12216 Papaya Ct., NE., Albuquerque, NM 87111);Hetrick, Joel A. (818 S. Gammon, Apartment 4, Madison, WI 53719)

Patent Classifications (CPCs):

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

B81B2201/031 - Thermal actuators
B81B2203/0109 - Bridges
B81B2203/0136 - Comb structures
B81B2203/051 - Translation according to an axis parallel to the substrate
B81B3/0037 - {For increasing stroke, i.e. achieve large displacement of actuated parts}
B81B3/0051 - {For defining the movement, i.e. structures that guide or limit the movement of an element

F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING

F16H21/44 - for conveying or interconverting oscillating or reciprocating motions

H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

H02N1/008 - {Laterally driven motors, e.g. of the comb-drive type}

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DOE Contract Number:  

AC04-94AL85000

Resource Type:

Patent

Country of Publication:

United States

Language:

English

Subject:

compliant; displacement-multiplying; apparatus; microelectromechanical; systems; pivotless; structure; disclosed; increase; geometric; advantage; mechanical; actuator; electrostatic; comb; capacitive-plate; thermal; based; combination; interconnected; flexible; beams; cross-beams; formed; layers; polysilicon; silicon; nitride; provide; 60; multiply; 25-3; displacement; provided; short-stroke; generate; stroke; 10-34; operate; ratchet-driven; device; microengine; play; conventional; devices; lever; arms; pivoting; joints; expected; reliable; associated; common; substrate; surface; micromachining; mechanical advantage; common substrate; electrostatic comb; silicon nitride; surface micromachining; thermal actuator; flexible beam; comb actuator; mechanical systems; pivoting joint; lever arm; /310/