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Title: Capacitively readout multi-element sensor array with common-mode cancellation

Abstract

An improved multi-element apparatus for detecting the presence of at least one chemical, biological or physical component in a monitored area comprising an array or single set of the following elements: a capacitive transducer having at least one cantilever spring element secured thereto, the cantilever element having an area thereof coated with a chemical having an affinity for the component to be detected; a pick-up plate positioned adjacent to the cantilever element at a distance such that a capacitance between the cantilever element and the pick-up plate changes as the distance between the cantilever element and the pick-up plate varies, the change in capacitance being a measurable variation; a detection means for measuring the measurable variation in the capacitance between the cantilever element and the pick-up plate that forms a measurement channel signal; and at least one feedback cantilever spring element positioned apart from the coated cantilever element, the cantilever element substantially unaffected by the component being monitored and providing a reference channel signal to the detection means that achieves a common mode cancellation between the measurement channel signal and reference channel signal.

Inventors:
 [1];  [2];  [2];  [3];  [2];  [2]
  1. (Alcoa, TN)
  2. Knoxville, TN
  3. Decatur, TN
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
873469
Patent Number(s):
6167748
Assignee:
Lockheed Martin Energy Research Corporation (Oak Ridge, TN); University of Tennessee Research Corporation (Knoxville, TN)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G - PHYSICS G01 - MEASURING G01D - MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
capacitively; readout; multi-element; sensor; array; common-mode; cancellation; improved; apparatus; detecting; presence; chemical; biological; physical; component; monitored; comprising; single; set; following; elements; capacitive; transducer; cantilever; spring; element; secured; thereto; coated; affinity; detected; pick-up; plate; positioned; adjacent; distance; capacitance; changes; varies; change; measurable; variation; detection; means; measuring; forms; measurement; channel; signal; feedback; apart; substantially; unaffected; providing; reference; achieves; common; mode; common mode; sensor array; detection means; spring element; positioned adjacent; secured thereto; single set; capacitive transducer; channel signal; plate positioned; element positioned; cantilever spring; /73/204/422/435/436/

Citation Formats

Britton, Jr., Charles L., Warmack, Robert J, Bryan, William L, Jones, Robert L, Oden, Patrick Ian, and Thundat, Thomas. Capacitively readout multi-element sensor array with common-mode cancellation. United States: N. p., 2001. Web.
Britton, Jr., Charles L., Warmack, Robert J, Bryan, William L, Jones, Robert L, Oden, Patrick Ian, & Thundat, Thomas. Capacitively readout multi-element sensor array with common-mode cancellation. United States.
Britton, Jr., Charles L., Warmack, Robert J, Bryan, William L, Jones, Robert L, Oden, Patrick Ian, and Thundat, Thomas. Mon . "Capacitively readout multi-element sensor array with common-mode cancellation". United States. https://www.osti.gov/servlets/purl/873469.
@article{osti_873469,
title = {Capacitively readout multi-element sensor array with common-mode cancellation},
author = {Britton, Jr., Charles L. and Warmack, Robert J and Bryan, William L and Jones, Robert L and Oden, Patrick Ian and Thundat, Thomas},
abstractNote = {An improved multi-element apparatus for detecting the presence of at least one chemical, biological or physical component in a monitored area comprising an array or single set of the following elements: a capacitive transducer having at least one cantilever spring element secured thereto, the cantilever element having an area thereof coated with a chemical having an affinity for the component to be detected; a pick-up plate positioned adjacent to the cantilever element at a distance such that a capacitance between the cantilever element and the pick-up plate changes as the distance between the cantilever element and the pick-up plate varies, the change in capacitance being a measurable variation; a detection means for measuring the measurable variation in the capacitance between the cantilever element and the pick-up plate that forms a measurement channel signal; and at least one feedback cantilever spring element positioned apart from the coated cantilever element, the cantilever element substantially unaffected by the component being monitored and providing a reference channel signal to the detection means that achieves a common mode cancellation between the measurement channel signal and reference channel signal.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}

Works referenced in this record:

Microfabrication of cantilever styli for the atomic force microscope
journal, July 1990

  • Albrecht, T. R.; Akamine, S.; Carver, T. E.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 8, Issue 4
  • https://doi.org/10.1116/1.576520

A capacitive pressure sensor with low impedance output and active suppression of parasitic effects
journal, February 1990


Measuring intermolecular binding forces with the Atomic-Force Microscope: The magnetic jump method
journal, January 1994


Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device
journal, November 1994


Sensing Discrete Streptavidin-Biotin Interactions with Atomic Force Microscopy
journal, February 1994


A nondestructive method for determining the spring constant of cantilevers for scanning force microscopy
journal, February 1993


A mechanical nanosensor in the gigahertz range: where mechanics meets electronics
journal, January 1994


Observation of a chemical reaction using a micromechanical sensor
journal, January 1994


A novel readout technique for capacitive gas sensors
journal, January 1990