Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3

Xiang, Xiao-Dong; Chang, Hauyee; Takeuchi, Ichiro

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Title: Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3

Abstract

A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.

Inventors:

Xiang, Xiao-Dong ^[1]; Chang, Hauyee ^[2]; Takeuchi, Ichiro ^[3]

Alameda, CA
Berkeley, CA
Albany, CA

Issue Date:: Sat Jan 01 00:00:00 EST 2000

Research Org.:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

OSTI Identifier:: 873376

Patent Number(s):: 6146907

Assignee:: United States of America as represented by United States (Washington, DC)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/088 - {of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal}
C23C14/5806 - {Thermal treatment}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/02197 - {the material having a perovskite structure, e.g. BaTiO3}
H01L21/02266 - {deposition by physical ablation of a target, e.g. sputtering, reactive sputtering, physical vapour deposition or pulsed laser deposition}
H01L21/31691 - {with perovskite structure}
H01L28/55 - {with a dielectric comprising a perovskite structure material}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01P - WAVEGUIDES
H01P11/00 - Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type

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DOE Contract Number:: AC03-76SF00098

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: method; forming; dielectric; film; loss; composition; sr; 1-x-y; 12-0; 25; 35-0; 47; 32-0; 53; thin-film; material; microwave; applications; including; capacitor; comprising; barium; strontium; calcium; titanium; perovskite; type; provided; formula; wide; compositional; range; single; deposition; process; deposition process; film comprising; film material; microwave applications; strontium calcium; thin-film material; thin-film comprising; loss composition; barium strontium; dielectric thin-film; /438/501/

Citation Formats


                    Xiang, Xiao-Dong, Chang, Hauyee, and Takeuchi, Ichiro. Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3.  United States: N. p., 2000. 
        Web.

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                    Xiang, Xiao-Dong, Chang, Hauyee, & Takeuchi, Ichiro. Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3.  United States.

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                    Xiang, Xiao-Dong, Chang, Hauyee, and Takeuchi, Ichiro. Sat .  
        "Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3".  United States.  https://www.osti.gov/servlets/purl/873376.

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@article{osti_873376,

  title        = {Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3},

  author       = {Xiang, Xiao-Dong and Chang, Hauyee and Takeuchi, Ichiro},

  abstractNote = {A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Sat Jan 01 00:00:00 EST 2000},

  month        = {Sat Jan 01 00:00:00 EST 2000}

}

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Works referenced in this record:

A low-loss composition region identified from a thin-film composition spread of (Ba1−x−ySrxCay)TiO3
journal, February 1999

Chang, H.; Takeuchi, I.; Xiang, X. -D.
Applied Physics Letters, Vol. 74, Issue 8
https://doi.org/10.1063/1.123475

High-Permittivity Perovskite Thin Films for Dynamic Random-Access Memories
journal, July 1996

Kingon, A. I.; Streiffer, S. K.; Basceri, C.
MRS Bulletin, Vol. 21, Issue 7
https://doi.org/10.1557/S0883769400035910

Solid Solubility Study of Barium, Strontium, and Calcium Titanates
journal, April 1950

Durst, G.; Grotenhuis, M.; Barkow, A. G.
Journal of the American Ceramic Society, Vol. 33, Issue 4
https://doi.org/10.1111/j.1151-2916.1950.tb12775.x

Discovery of a useful thin-film dielectric using a composition-spread approach
journal, March 1998

van Dover, R. B.; Schneemeyer, L. F.; Fleming, R. M.
Nature, Vol. 392, Issue 6672
https://doi.org/10.1038/32381

Comparative Study of Amorphous and Crystalline (Ba, Sr)TiO ₃ Thin Films Deposited by Laser Ablation
journal, September 1993

Bhattacharya, Pijush; Komeda, Tadahiro; Park, Kyung-ho
Japanese Journal of Applied Physics, Vol. 32, Issue Part 1, No. 9B
https://doi.org/10.1143/JJAP.32.4103

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Title: Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3

Abstract

Citation Formats

A low-loss composition region identified from a thin-film composition spread of (Ba1−x−ySrxCay)TiO3 journal, February 1999

High-Permittivity Perovskite Thin Films for Dynamic Random-Access Memories journal, July 1996

Solid Solubility Study of Barium, Strontium, and Calcium Titanates journal, April 1950

Discovery of a useful thin-film dielectric using a composition-spread approach journal, March 1998

Comparative Study of Amorphous and Crystalline (Ba, Sr)TiO 3 Thin Films Deposited by Laser Ablation journal, September 1993

A low-loss composition region identified from a thin-film composition spread of (Ba1−x−ySrxCay)TiO3
journal, February 1999

High-Permittivity Perovskite Thin Films for Dynamic Random-Access Memories
journal, July 1996

Solid Solubility Study of Barium, Strontium, and Calcium Titanates
journal, April 1950

Discovery of a useful thin-film dielectric using a composition-spread approach
journal, March 1998

Comparative Study of Amorphous and Crystalline (Ba, Sr)TiO ₃ Thin Films Deposited by Laser Ablation
journal, September 1993