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Title: Low work function surface layers produced by laser ablation using short-wavelength photons

Abstract

Short-wavelength photons are used to ablate material from a low work function target onto a suitable substrate. The short-wavelength photons are at or below visible wavelength. The elemental composition of the deposit is controlled by the composition of the target and the gaseous environment in which the ablation process is performed. The process is carried out in a deposition chamber to which a short-wavelength laser is mounted and which includes a substrate holder which can be rotated, tilted, heated, or cooled. The target material is mounted onto a holder that spins the target during laser ablation. In addition, the deposition chamber is provided with a vacuum pump, an external gas supply with atomizer and radical generator, a gas generator for producing a flow of molecules on the substrate, and a substrate cleaning device, such as an ion gun. The substrate can be rotated and tilted, for example, whereby only the tip of an emitter can be coated with a low work function material.

Inventors:
 [1];  [2];  [1]
  1. Berkeley, CA
  2. Concord, CA
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
873250
Patent Number(s):
6120857
Assignee:
Regents of University of California (Oakland, CA)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
function; surface; layers; produced; laser; ablation; short-wavelength; photons; ablate; material; target; suitable; substrate; below; visible; wavelength; elemental; composition; deposit; controlled; gaseous; environment; process; performed; carried; deposition; chamber; mounted; holder; rotated; tilted; heated; cooled; spins; addition; provided; vacuum; pump; external; gas; supply; atomizer; radical; generator; producing; flow; molecules; cleaning; device; gun; example; whereby; tip; emitter; coated; wavelength laser; gas generator; substrate holder; gas supply; deposition chamber; surface layer; target material; laser ablation; suitable substrate; vacuum pump; surface layers; short-wavelength photons; cleaning device; elemental composition; visible wavelength; wavelength photons; target mater; ablate material; /427/

Citation Formats

Balooch, Mehdi, Dinh, Long N, and Siekhaus, Wigbert J. Low work function surface layers produced by laser ablation using short-wavelength photons. United States: N. p., 2000. Web.
Balooch, Mehdi, Dinh, Long N, & Siekhaus, Wigbert J. Low work function surface layers produced by laser ablation using short-wavelength photons. United States.
Balooch, Mehdi, Dinh, Long N, and Siekhaus, Wigbert J. Sat . "Low work function surface layers produced by laser ablation using short-wavelength photons". United States. https://www.osti.gov/servlets/purl/873250.
@article{osti_873250,
title = {Low work function surface layers produced by laser ablation using short-wavelength photons},
author = {Balooch, Mehdi and Dinh, Long N and Siekhaus, Wigbert J},
abstractNote = {Short-wavelength photons are used to ablate material from a low work function target onto a suitable substrate. The short-wavelength photons are at or below visible wavelength. The elemental composition of the deposit is controlled by the composition of the target and the gaseous environment in which the ablation process is performed. The process is carried out in a deposition chamber to which a short-wavelength laser is mounted and which includes a substrate holder which can be rotated, tilted, heated, or cooled. The target material is mounted onto a holder that spins the target during laser ablation. In addition, the deposition chamber is provided with a vacuum pump, an external gas supply with atomizer and radical generator, a gas generator for producing a flow of molecules on the substrate, and a substrate cleaning device, such as an ion gun. The substrate can be rotated and tilted, for example, whereby only the tip of an emitter can be coated with a low work function material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

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