Method of forming a stress relieved amorphous tetrahedrally-coordinated carbon film
Abstract
A stress-relieved amorphous-diamond film is formed by depositing an amorphous diamond film with specific atomic structure and bonding on to a substrate, and annealing the film at sufficiently high temperature to relieve the compressive stress in said film without significantly softening said film. The maximum annealing temperature is preferably on the order of 650.degree. C., a much lower value than is expected from the annealing behavior of other materials.
- Inventors:
-
- Albuquerque, NM
- Placitas, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 873158
- Patent Number(s):
- 6103305
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; forming; stress; relieved; amorphous; tetrahedrally-coordinated; carbon; film; stress-relieved; amorphous-diamond; formed; depositing; diamond; specific; atomic; structure; bonding; substrate; annealing; sufficiently; temperature; relieve; compressive; significantly; softening; maximum; preferably; 650; degree; value; expected; behavior; materials; amorphous diamond; carbon film; diamond film; compressive stress; annealing temperature; specific atomic; relieved amorphous; coordinated carbon; /427/
Citation Formats
Friedmann, Thomas A, and Sullivan, John P. Method of forming a stress relieved amorphous tetrahedrally-coordinated carbon film. United States: N. p., 2000.
Web.
Friedmann, Thomas A, & Sullivan, John P. Method of forming a stress relieved amorphous tetrahedrally-coordinated carbon film. United States.
Friedmann, Thomas A, and Sullivan, John P. Sat .
"Method of forming a stress relieved amorphous tetrahedrally-coordinated carbon film". United States. https://www.osti.gov/servlets/purl/873158.
@article{osti_873158,
title = {Method of forming a stress relieved amorphous tetrahedrally-coordinated carbon film},
author = {Friedmann, Thomas A and Sullivan, John P},
abstractNote = {A stress-relieved amorphous-diamond film is formed by depositing an amorphous diamond film with specific atomic structure and bonding on to a substrate, and annealing the film at sufficiently high temperature to relieve the compressive stress in said film without significantly softening said film. The maximum annealing temperature is preferably on the order of 650.degree. C., a much lower value than is expected from the annealing behavior of other materials.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}
Works referenced in this record:
Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond
journal, December 1997
- Friedmann, T. A.; Sullivan, J. P.; Knapp, J. A.
- Applied Physics Letters, Vol. 71, Issue 26
Deposition of hydrogen‐free diamond‐like carbon film by plasma enhanced chemical vapor deposition
journal, June 1996
- Park, Kyu Chang; Moon, Jong Hyun; Jang, Jin
- Applied Physics Letters, Vol. 68, Issue 25