Fabrication of an optical component
Abstract
A method for forming optical parts used in laser optical systems such as high energy lasers, high average power lasers, semiconductor capital equipment and medical devices. The optical parts will not damage during the operation of high power lasers in the ultra-violet light range. A blank is first ground using a fixed abrasive grinding method to remove the subsurface damage formed during the fabrication of the blank. The next step grinds and polishes the edges and forms bevels to reduce the amount of fused-glass contaminants in the subsequent steps. A loose abrasive grind removes the subsurface damage formed during the fixed abrasive or "blanchard" removal process. After repolishing the bevels and performing an optional fluoride etch, the surface of the blank is polished using a zirconia slurry. Any subsurface damage formed during the loose abrasive grind will be removed during this zirconia polish. A post polish etch may be performed to remove any redeposited contaminants. Another method uses a ceria polishing step to remove the subsurface damage formed during the loose abrasive grind. However, any residual ceria may interfere with the optical properties of the finished part. Therefore, the ceria and other contaminants are removed by performing either a zirconiamore »
- Inventors:
-
- Livermore, CA
- Pleasanton, CA
- Oakland, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 873134
- Patent Number(s):
- 6099389
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B24 - GRINDING B24B - MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- fabrication; optical; component; method; forming; laser; systems; energy; lasers; average; power; semiconductor; capital; equipment; medical; devices; damage; operation; ultra-violet; light; range; blank; ground; fixed; abrasive; grinding; remove; subsurface; formed; step; grinds; polishes; edges; forms; bevels; reduce; amount; fused-glass; contaminants; subsequent; steps; loose; grind; removes; blanchard; removal; process; repolishing; performing; optional; fluoride; etch; surface; polished; zirconia; slurry; removed; polish; post; performed; redeposited; ceria; polishing; residual; interfere; properties; finished; power lasers; removal process; laser optical; optical systems; average power; power laser; optical properties; medical device; energy laser; medical devices; abrasive grind; abrasive grinding; subsequent step; optical component; energy lasers; forming optic; violet light; /451/
Citation Formats
Nichols, Michael A, Aikens, David M, Camp, David W, Thomas, Ian M, Kiikka, Craig, Sheehan, Lynn M, and Kozlowski, Mark R. Fabrication of an optical component. United States: N. p., 2000.
Web.
Nichols, Michael A, Aikens, David M, Camp, David W, Thomas, Ian M, Kiikka, Craig, Sheehan, Lynn M, & Kozlowski, Mark R. Fabrication of an optical component. United States.
Nichols, Michael A, Aikens, David M, Camp, David W, Thomas, Ian M, Kiikka, Craig, Sheehan, Lynn M, and Kozlowski, Mark R. Sat .
"Fabrication of an optical component". United States. https://www.osti.gov/servlets/purl/873134.
@article{osti_873134,
title = {Fabrication of an optical component},
author = {Nichols, Michael A and Aikens, David M and Camp, David W and Thomas, Ian M and Kiikka, Craig and Sheehan, Lynn M and Kozlowski, Mark R},
abstractNote = {A method for forming optical parts used in laser optical systems such as high energy lasers, high average power lasers, semiconductor capital equipment and medical devices. The optical parts will not damage during the operation of high power lasers in the ultra-violet light range. A blank is first ground using a fixed abrasive grinding method to remove the subsurface damage formed during the fabrication of the blank. The next step grinds and polishes the edges and forms bevels to reduce the amount of fused-glass contaminants in the subsequent steps. A loose abrasive grind removes the subsurface damage formed during the fixed abrasive or "blanchard" removal process. After repolishing the bevels and performing an optional fluoride etch, the surface of the blank is polished using a zirconia slurry. Any subsurface damage formed during the loose abrasive grind will be removed during this zirconia polish. A post polish etch may be performed to remove any redeposited contaminants. Another method uses a ceria polishing step to remove the subsurface damage formed during the loose abrasive grind. However, any residual ceria may interfere with the optical properties of the finished part. Therefore, the ceria and other contaminants are removed by performing either a zirconia polish after the ceria polish or a post ceria polish etch.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}