Position control system for use with micromechanical actuators
Abstract
A positioning system adapted for use with micromechanical actuators provides feedback control of the position of the movable element of the actuator utilizing a low Q sensing coil. The effective inductance of the sensing coil changes with position of the movable element to change the frequency of oscillation of a variable oscillator. The output of the variable oscillator is compared in a phase detector to a reference oscillator signal. The phase detector provides a pulsed output having a pulse duty cycle related to the phase or frequency difference between the oscillator signals. The output of the phase detector is provided to a drive coil which applies a magnetic force to the movable element which balances the force of a spring. The movable element can be displaced to a new position by changing the frequency of the reference oscillator.
- Inventors:
-
- Madison, WI
- Issue Date:
- OSTI Identifier:
- 873090
- Patent Number(s):
- 6087743
- Assignee:
- Wisconsin Alumni Research Foundation (Madison, WI)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H02 - GENERATION H02K - DYNAMO-ELECTRIC MACHINES
- DOE Contract Number:
- AV-5723
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- position; control; micromechanical; actuators; positioning; adapted; provides; feedback; movable; element; actuator; utilizing; sensing; coil; effective; inductance; changes; change; frequency; oscillation; variable; oscillator; output; compared; phase; detector; reference; signal; pulsed; pulse; duty; cycle; related; difference; signals; provided; drive; applies; magnetic; force; balances; spring; displaced; changing; magnetic force; sensing coil; feedback control; duty cycle; movable element; drive coil; position control; provides feedback; micromechanical actuators; oscillator signal; micromechanical actuator; actuator utilizing; actuators provide; /310/318/324/
Citation Formats
Guckel, Henry, and Stiers, Eric W. Position control system for use with micromechanical actuators. United States: N. p., 2000.
Web.
Guckel, Henry, & Stiers, Eric W. Position control system for use with micromechanical actuators. United States.
Guckel, Henry, and Stiers, Eric W. Sat .
"Position control system for use with micromechanical actuators". United States. https://www.osti.gov/servlets/purl/873090.
@article{osti_873090,
title = {Position control system for use with micromechanical actuators},
author = {Guckel, Henry and Stiers, Eric W},
abstractNote = {A positioning system adapted for use with micromechanical actuators provides feedback control of the position of the movable element of the actuator utilizing a low Q sensing coil. The effective inductance of the sensing coil changes with position of the movable element to change the frequency of oscillation of a variable oscillator. The output of the variable oscillator is compared in a phase detector to a reference oscillator signal. The phase detector provides a pulsed output having a pulse duty cycle related to the phase or frequency difference between the oscillator signals. The output of the phase detector is provided to a drive coil which applies a magnetic force to the movable element which balances the force of a spring. The movable element can be displaced to a new position by changing the frequency of the reference oscillator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 2000},
month = {Sat Jan 01 00:00:00 EST 2000}
}
Works referenced in this record:
Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique
journal, February 1990
- Suzuki, S.; Tuchitani, S.; Sato, K.
- Sensors and Actuators A: Physical, Vol. 21, Issue 1-3
Electromagnetic linear actuators with inductive position sensing
journal, May 1996
- Guckel, H.; Earles, T.; Klein, J.
- Sensors and Actuators A: Physical, Vol. 53, Issue 1-3