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Title: Position control system for use with micromechanical actuators

Abstract

A positioning system adapted for use with micromechanical actuators provides feedback control of the position of the movable element of the actuator utilizing a low Q sensing coil. The effective inductance of the sensing coil changes with position of the movable element to change the frequency of oscillation of a variable oscillator. The output of the variable oscillator is compared in a phase detector to a reference oscillator signal. The phase detector provides a pulsed output having a pulse duty cycle related to the phase or frequency difference between the oscillator signals. The output of the phase detector is provided to a drive coil which applies a magnetic force to the movable element which balances the force of a spring. The movable element can be displaced to a new position by changing the frequency of the reference oscillator.

Inventors:
 [1];  [1]
  1. Madison, WI
Issue Date:
OSTI Identifier:
873090
Patent Number(s):
6087743
Assignee:
Wisconsin Alumni Research Foundation (Madison, WI)
Patent Classifications (CPCs):
H - ELECTRICITY H02 - GENERATION H02K - DYNAMO-ELECTRIC MACHINES
DOE Contract Number:  
AV-5723
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
position; control; micromechanical; actuators; positioning; adapted; provides; feedback; movable; element; actuator; utilizing; sensing; coil; effective; inductance; changes; change; frequency; oscillation; variable; oscillator; output; compared; phase; detector; reference; signal; pulsed; pulse; duty; cycle; related; difference; signals; provided; drive; applies; magnetic; force; balances; spring; displaced; changing; magnetic force; sensing coil; feedback control; duty cycle; movable element; drive coil; position control; provides feedback; micromechanical actuators; oscillator signal; micromechanical actuator; actuator utilizing; actuators provide; /310/318/324/

Citation Formats

Guckel, Henry, and Stiers, Eric W. Position control system for use with micromechanical actuators. United States: N. p., 2000. Web.
Guckel, Henry, & Stiers, Eric W. Position control system for use with micromechanical actuators. United States.
Guckel, Henry, and Stiers, Eric W. Sat . "Position control system for use with micromechanical actuators". United States. https://www.osti.gov/servlets/purl/873090.
@article{osti_873090,
title = {Position control system for use with micromechanical actuators},
author = {Guckel, Henry and Stiers, Eric W},
abstractNote = {A positioning system adapted for use with micromechanical actuators provides feedback control of the position of the movable element of the actuator utilizing a low Q sensing coil. The effective inductance of the sensing coil changes with position of the movable element to change the frequency of oscillation of a variable oscillator. The output of the variable oscillator is compared in a phase detector to a reference oscillator signal. The phase detector provides a pulsed output having a pulse duty cycle related to the phase or frequency difference between the oscillator signals. The output of the phase detector is provided to a drive coil which applies a magnetic force to the movable element which balances the force of a spring. The movable element can be displaced to a new position by changing the frequency of the reference oscillator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

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Works referenced in this record:

Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique
journal, February 1990


Electromagnetic linear actuators with inductive position sensing
journal, May 1996