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Title: Method of producing solution-derived metal oxide thin films

Abstract

A method of preparing metal oxide thin films by a solution method. A .beta.-metal .beta.-diketonate or carboxylate compound, where the metal is selected from groups 8, 9, 10, 11, and 12 of the Periodic Table, is solubilized in a strong Lewis base to form a homogeneous solution. This precursor solution forms within minutes and can be deposited on a substrate in a single layer or a multiple layers to form a metal oxide thin film. The substrate with the deposited thin film is heated to change the film from an amorphous phase to a ceramic metal oxide and cooled.

Inventors:
 [1];  [1]
  1. (Albuquerque, NM)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
873083
Patent Number(s):
6086957
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; producing; solution-derived; metal; oxide; films; preparing; solution; beta; -metal; -diketonate; carboxylate; compound; selected; 10; 11; 12; periodic; table; solubilized; strong; lewis; base; form; homogeneous; precursor; forms; minutes; deposited; substrate; single; layer; multiple; layers; film; heated; change; amorphous; phase; ceramic; cooled; amorphous phase; multiple layer; lewis base; preparing metal; precursor solution; ceramic metal; single layer; metal oxide; periodic table; multiple layers; solution form; strong lewis; solution forms; /427/

Citation Formats

Boyle, Timothy J., and Ingersoll, David. Method of producing solution-derived metal oxide thin films. United States: N. p., 2000. Web.
Boyle, Timothy J., & Ingersoll, David. Method of producing solution-derived metal oxide thin films. United States.
Boyle, Timothy J., and Ingersoll, David. Sat . "Method of producing solution-derived metal oxide thin films". United States. https://www.osti.gov/servlets/purl/873083.
@article{osti_873083,
title = {Method of producing solution-derived metal oxide thin films},
author = {Boyle, Timothy J. and Ingersoll, David},
abstractNote = {A method of preparing metal oxide thin films by a solution method. A .beta.-metal .beta.-diketonate or carboxylate compound, where the metal is selected from groups 8, 9, 10, 11, and 12 of the Periodic Table, is solubilized in a strong Lewis base to form a homogeneous solution. This precursor solution forms within minutes and can be deposited on a substrate in a single layer or a multiple layers to form a metal oxide thin film. The substrate with the deposited thin film is heated to change the film from an amorphous phase to a ceramic metal oxide and cooled.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

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