Method of producing solution-derived metal oxide thin films
Abstract
A method of preparing metal oxide thin films by a solution method. A .beta.-metal .beta.-diketonate or carboxylate compound, where the metal is selected from groups 8, 9, 10, 11, and 12 of the Periodic Table, is solubilized in a strong Lewis base to form a homogeneous solution. This precursor solution forms within minutes and can be deposited on a substrate in a single layer or a multiple layers to form a metal oxide thin film. The substrate with the deposited thin film is heated to change the film from an amorphous phase to a ceramic metal oxide and cooled.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 873083
- Patent Number(s):
- 6086957
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; producing; solution-derived; metal; oxide; films; preparing; solution; beta; -metal; -diketonate; carboxylate; compound; selected; 10; 11; 12; periodic; table; solubilized; strong; lewis; base; form; homogeneous; precursor; forms; minutes; deposited; substrate; single; layer; multiple; layers; film; heated; change; amorphous; phase; ceramic; cooled; amorphous phase; multiple layer; lewis base; preparing metal; precursor solution; ceramic metal; single layer; metal oxide; periodic table; multiple layers; solution form; strong lewis; solution forms; /427/
Citation Formats
Boyle, Timothy J, and Ingersoll, David. Method of producing solution-derived metal oxide thin films. United States: N. p., 2000.
Web.
Boyle, Timothy J, & Ingersoll, David. Method of producing solution-derived metal oxide thin films. United States.
Boyle, Timothy J, and Ingersoll, David. Sat .
"Method of producing solution-derived metal oxide thin films". United States. https://www.osti.gov/servlets/purl/873083.
@article{osti_873083,
title = {Method of producing solution-derived metal oxide thin films},
author = {Boyle, Timothy J and Ingersoll, David},
abstractNote = {A method of preparing metal oxide thin films by a solution method. A .beta.-metal .beta.-diketonate or carboxylate compound, where the metal is selected from groups 8, 9, 10, 11, and 12 of the Periodic Table, is solubilized in a strong Lewis base to form a homogeneous solution. This precursor solution forms within minutes and can be deposited on a substrate in a single layer or a multiple layers to form a metal oxide thin film. The substrate with the deposited thin film is heated to change the film from an amorphous phase to a ceramic metal oxide and cooled.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}
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