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Title: Method for accurately positioning a device at a desired area of interest

Abstract

A method for positioning a first device utilizing a surface having a viewing translation stage, the surface being movable between a first position where the viewing stage is in operational alignment with a first device and a second position where the viewing stage is in operational alignment with a second device. The movable surface is placed in the first position and an image is produced with the first device of an identifiable characteristic of a calibration object on the viewing stage. The moveable surface is then placed in the second position and only the second device is moved until an image of the identifiable characteristic in the second device matches the image from the first device. The calibration object is then replaced on the stage of the surface with a test object, and the viewing translation stage is adjusted until the second device images the area of interest. The surface is then moved to the first position where the test object is scanned with the first device to image the area of interest. An alternative embodiment where the devices move is also disclosed.

Inventors:
 [1];  [2];  [2]
  1. Tijeras, NM
  2. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
873076
Patent Number(s):
6085581
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; accurately; positioning; device; desired; utilizing; surface; viewing; translation; stage; movable; position; operational; alignment; placed; image; produced; identifiable; characteristic; calibration; moveable; moved; matches; replaced; adjusted; images; scanned; alternative; embodiment; devices; move; disclosed; translation stage; alternative embodiment; movable surface; accurately positioning; accurately position; device utilizing; /73/

Citation Formats

Jones, Gary D, Houston, Jack E, and Gillen, Kenneth T. Method for accurately positioning a device at a desired area of interest. United States: N. p., 2000. Web.
Jones, Gary D, Houston, Jack E, & Gillen, Kenneth T. Method for accurately positioning a device at a desired area of interest. United States.
Jones, Gary D, Houston, Jack E, and Gillen, Kenneth T. Sat . "Method for accurately positioning a device at a desired area of interest". United States. https://www.osti.gov/servlets/purl/873076.
@article{osti_873076,
title = {Method for accurately positioning a device at a desired area of interest},
author = {Jones, Gary D and Houston, Jack E and Gillen, Kenneth T},
abstractNote = {A method for positioning a first device utilizing a surface having a viewing translation stage, the surface being movable between a first position where the viewing stage is in operational alignment with a first device and a second position where the viewing stage is in operational alignment with a second device. The movable surface is placed in the first position and an image is produced with the first device of an identifiable characteristic of a calibration object on the viewing stage. The moveable surface is then placed in the second position and only the second device is moved until an image of the identifiable characteristic in the second device matches the image from the first device. The calibration object is then replaced on the stage of the surface with a test object, and the viewing translation stage is adjusted until the second device images the area of interest. The surface is then moved to the first position where the test object is scanned with the first device to image the area of interest. An alternative embodiment where the devices move is also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

Works referenced in this record:

Dimensional metrology with scanning probe microscopes
journal, November 1993


Scanning tunneling microscope combined with optical microscope for large sample measurement
journal, January 1990