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Title: Supplemental heating of deposition tooling shields

Abstract

A method of reducing particle generation from the thin coating deposited on the internal surfaces of a deposition chamber which undergoes temperature variation greater than 100.degree. C. comprising maintaining the temperature variation of the internal surfaces low enough during the process cycle to keep thermal expansion stresses between the coating and the surfaces under 500 MPa. For titanium nitride deposited on stainless steel, this means keeping temperature variations under approximately 70.degree. C. in a chamber that may be heated to over 350.degree. C. during a typical processing operation. Preferably, a supplemental heater is mounted behind the upper shield and controlled by a temperature sensitive element which provides feedback control based on the temperature of the upper shield.

Inventors:
 [1];  [1];  [1];  [1]
  1. (Albuquerque, NM)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
873067
Patent Number(s):
6083360
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
supplemental; heating; deposition; tooling; shields; method; reducing; particle; generation; coating; deposited; internal; surfaces; chamber; undergoes; temperature; variation; 100; degree; comprising; maintaining; process; cycle; thermal; expansion; stresses; 500; mpa; titanium; nitride; stainless; steel; means; keeping; variations; approximately; 70; heated; 350; typical; processing; operation; preferably; heater; mounted; upper; shield; controlled; sensitive; element; provides; feedback; control; based; temperature sensitive; internal surface; internal surfaces; temperature variations; deposition chamber; titanium nitride; thermal expansion; stainless steel; feedback control; reducing particle; provides feedback; temperature variation; sensitive element; comprising maintaining; expansion stresses; supplemental heat; /204/118/427/

Citation Formats

Ohlhausen, James A., Peebles, Diane E., Hunter, John A., and Eckelmeyer, Kenneth H. Supplemental heating of deposition tooling shields. United States: N. p., 2000. Web.
Ohlhausen, James A., Peebles, Diane E., Hunter, John A., & Eckelmeyer, Kenneth H. Supplemental heating of deposition tooling shields. United States.
Ohlhausen, James A., Peebles, Diane E., Hunter, John A., and Eckelmeyer, Kenneth H. Sat . "Supplemental heating of deposition tooling shields". United States. https://www.osti.gov/servlets/purl/873067.
@article{osti_873067,
title = {Supplemental heating of deposition tooling shields},
author = {Ohlhausen, James A. and Peebles, Diane E. and Hunter, John A. and Eckelmeyer, Kenneth H.},
abstractNote = {A method of reducing particle generation from the thin coating deposited on the internal surfaces of a deposition chamber which undergoes temperature variation greater than 100.degree. C. comprising maintaining the temperature variation of the internal surfaces low enough during the process cycle to keep thermal expansion stresses between the coating and the surfaces under 500 MPa. For titanium nitride deposited on stainless steel, this means keeping temperature variations under approximately 70.degree. C. in a chamber that may be heated to over 350.degree. C. during a typical processing operation. Preferably, a supplemental heater is mounted behind the upper shield and controlled by a temperature sensitive element which provides feedback control based on the temperature of the upper shield.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

Patent:

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