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Title: Thermophoretic vacuum wand

Abstract

A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.

Inventors:
 [1];  [2]
  1. (San Ramon, CA)
  2. (Lafayette, CA)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
873027
Patent Number(s):
6072157
Assignee:
EUV LLC (Santa Clara, CA) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
thermophoretic; vacuum; wand; particularly; suited; transporting; articles; cleanroom; environment; potential; particle; contaminants; air; adhered; surface; article; described; housing; platen; front; suction; source; applying; negative; pressure; heating; device; held; affords; protection; effectively; prevents; particles; depositing; vacuum wand; heating device; particularly suited; front surface; negative pressure; thermophoretic vacuum; vacuum source; cleanroom environment; particle contaminants; effectively prevents; transporting articles; potential particle; /219/269/279/294/

Citation Formats

Klebanoff, Leonard Elliott, and Rader, Daniel John. Thermophoretic vacuum wand. United States: N. p., 2000. Web.
Klebanoff, Leonard Elliott, & Rader, Daniel John. Thermophoretic vacuum wand. United States.
Klebanoff, Leonard Elliott, and Rader, Daniel John. Sat . "Thermophoretic vacuum wand". United States. https://www.osti.gov/servlets/purl/873027.
@article{osti_873027,
title = {Thermophoretic vacuum wand},
author = {Klebanoff, Leonard Elliott and Rader, Daniel John},
abstractNote = {A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

Patent:

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