Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes
Abstract
Disclosed are lens apparatus in which a beam of charged particlesis brought to a focus by means of a magnetic field, the lens being situated behind the target position. In illustrative embodiments, a lens apparatus is employed in a scanning electron microscopeas the sole lens for high-resolution focusing of an electron beam, and in particular, an electron beam having an accelerating voltage of from about 10 to about 30,000 V. In one embodiment, the lens apparatus comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. In other embodiments, the lens apparatus comprises a magnetic dipole or virtual magnetic monopole fabricated from a variety of materials, including permanent magnets, superconducting coils, and magnetizable spheres and needles contained within an energy-conducting coil. Multiple-array lens apparatus are also disclosed for simultaneous and/or consecutive imaging of multiple images on single or multiple specimens. The invention further provides apparatus, methods, and devices useful in focusing charged particle beams for lithographic processes.
- Inventors:
-
- Dune Acres, IN
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 872959
- Patent Number(s):
- 6051839
- Assignee:
- Arch Development Corporation (Chicago, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- FE02-86ER60437
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- magnetic; lens; apparatus; high-resolution; scanning; electron; microscopes; lithographic; processes; disclosed; beam; charged; particlesis; brought; focus; means; field; situated; target; position; illustrative; embodiments; employed; microscopeas; sole; focusing; particular; accelerating; voltage; 10; 30; 000; embodiment; comprises; electrically-conducting; coil; arranged; axis; pole; piece; extending; space; surrounded; dipole; virtual; monopole; fabricated; variety; materials; including; permanent; magnets; superconducting; coils; magnetizable; spheres; needles; contained; energy-conducting; multiple-array; simultaneous; consecutive; imaging; multiple; images; single; specimens; provides; methods; devices; useful; particle; beams; scanning electron; superconducting coils; magnetic lens; electron microscope; superconducting coil; particle beam; apparatus comprises; charged particles; permanent magnet; magnetic field; electron beam; permanent magnets; charged particle; particle beams; lens apparatus; provides apparatus; apparatus comprise; multiple images; target position; conducting coils; electron microscopes; illustrative embodiment; pole piece; accelerating voltage; magnetic pole; /250/
Citation Formats
Crewe, Albert V. Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes. United States: N. p., 2000.
Web.
Crewe, Albert V. Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes. United States.
Crewe, Albert V. Sat .
"Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes". United States. https://www.osti.gov/servlets/purl/872959.
@article{osti_872959,
title = {Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes},
author = {Crewe, Albert V},
abstractNote = {Disclosed are lens apparatus in which a beam of charged particlesis brought to a focus by means of a magnetic field, the lens being situated behind the target position. In illustrative embodiments, a lens apparatus is employed in a scanning electron microscopeas the sole lens for high-resolution focusing of an electron beam, and in particular, an electron beam having an accelerating voltage of from about 10 to about 30,000 V. In one embodiment, the lens apparatus comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. In other embodiments, the lens apparatus comprises a magnetic dipole or virtual magnetic monopole fabricated from a variety of materials, including permanent magnets, superconducting coils, and magnetizable spheres and needles contained within an energy-conducting coil. Multiple-array lens apparatus are also disclosed for simultaneous and/or consecutive imaging of multiple images on single or multiple specimens. The invention further provides apparatus, methods, and devices useful in focusing charged particle beams for lithographic processes.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 2000},
month = {Sat Jan 01 00:00:00 EST 2000}
}
Works referenced in this record:
Limits of low-energy electron optics
journal, November 1993
- Hordon, Laurence S.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 11, Issue 6
A Novel High-Resolution Scanning Electron Microscope for the Surface Analysis of High-Aspect-Ratio Three-Dimensional Structures
journal, September 1991
- Nakagawa, Hideo; Nomura, Noboru; Koizumi, Taichi
- Japanese Journal of Applied Physics, Vol. 30, Issue Part 1, No. 9A