Coordinated X-Y stage apparatus
Abstract
An apparatus based on precision X-Y stages that are stacked. Attached to arms projecting from each X-Y stage are a set of two axis gimbals. Attached to the gimbals is a rod, which provides motion along the axis of the rod and rotation around its axis. A dual-planar apparatus that provides six degrees of freedom of motion precise to within microns of motion.
- Inventors:
-
- Albuquerque, NM
- Germantown, TN
- Springfield, KY
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 872822
- Patent Number(s):
- 6016607
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
A - HUMAN NECESSITIES A61 - MEDICAL OR VETERINARY SCIENCE A61B - DIAGNOSIS
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- coordinated; x-y; stage; apparatus; based; precision; stages; stacked; attached; arms; projecting; set; axis; gimbals; rod; provides; motion; rotation; dual-planar; six; degrees; freedom; precise; microns; six degrees; provides motion; provides six; x-y stages; apparatus based; arms projecting; axis gimbals; precision x-y; motion precise; x-y stage; dual-planar apparatus; six degree; /33/74/
Citation Formats
Morimoto, Alan K, Kozlowski, David M, Charles, Steven T, and Spalding, James A. Coordinated X-Y stage apparatus. United States: N. p., 2000.
Web.
Morimoto, Alan K, Kozlowski, David M, Charles, Steven T, & Spalding, James A. Coordinated X-Y stage apparatus. United States.
Morimoto, Alan K, Kozlowski, David M, Charles, Steven T, and Spalding, James A. Sat .
"Coordinated X-Y stage apparatus". United States. https://www.osti.gov/servlets/purl/872822.
@article{osti_872822,
title = {Coordinated X-Y stage apparatus},
author = {Morimoto, Alan K and Kozlowski, David M and Charles, Steven T and Spalding, James A},
abstractNote = {An apparatus based on precision X-Y stages that are stacked. Attached to arms projecting from each X-Y stage are a set of two axis gimbals. Attached to the gimbals is a rod, which provides motion along the axis of the rod and rotation around its axis. A dual-planar apparatus that provides six degrees of freedom of motion precise to within microns of motion.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}