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Title: Magnetic positioner having a single moving part

Abstract

A magnetic positioner is provided which is capable of providing long travel in two dimension and short travel in the remaining four dimensions. The positioner has a movable stage and a stator oriented adjacent and substantially parallel to this stage. At least three sets of first magnetic elements, which for preferred embodiments are winding sets capable of generating forces in two directions, are on the portion of the stator adjacent to the stage at any given time, and at least two second magnetic elements, which are magnet arrays for the preferred embodiment, are on the stage adjacent to the stator. At least one of the second magnetic elements overlaps multiple first magnetic elements for all positions of the stage relative to the stator, with one magnet overlapping multiple windings for one preferred embodiment of the invention and two magnets on the stage overlapping multiple windings on the stator for a second embodiment. The windings form a linear motor providing forces in both a corresponding long travel dimension and in a dimension perpendicular to both long travel dimensions.

Inventors:
 [1];  [2]
  1. Plaistow, NH
  2. Cambridge, MA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
872764
Patent Number(s):
6003230
Assignee:
Massachusetts Institute of Technology (Cambridge, MA)
Patent Classifications (CPCs):
H - ELECTRICITY H02 - GENERATION H02K - DYNAMO-ELECTRIC MACHINES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
magnetic; positioner; single; moving; provided; capable; providing; travel; dimension; remaining; dimensions; movable; stage; stator; oriented; adjacent; substantially; parallel; sets; elements; preferred; embodiments; winding; generating; forces; directions; portion; time; magnet; arrays; embodiment; overlaps; multiple; positions; relative; overlapping; windings; magnets; form; linear; motor; corresponding; perpendicular; preferred embodiments; preferred embodiment; substantially parallel; magnet arrays; linear motor; magnetic positioner; /33/

Citation Formats

Trumper, David L, and Kim, Won-Jong. Magnetic positioner having a single moving part. United States: N. p., 1999. Web.
Trumper, David L, & Kim, Won-Jong. Magnetic positioner having a single moving part. United States.
Trumper, David L, and Kim, Won-Jong. Fri . "Magnetic positioner having a single moving part". United States. https://www.osti.gov/servlets/purl/872764.
@article{osti_872764,
title = {Magnetic positioner having a single moving part},
author = {Trumper, David L and Kim, Won-Jong},
abstractNote = {A magnetic positioner is provided which is capable of providing long travel in two dimension and short travel in the remaining four dimensions. The positioner has a movable stage and a stator oriented adjacent and substantially parallel to this stage. At least three sets of first magnetic elements, which for preferred embodiments are winding sets capable of generating forces in two directions, are on the portion of the stator adjacent to the stage at any given time, and at least two second magnetic elements, which are magnet arrays for the preferred embodiment, are on the stage adjacent to the stator. At least one of the second magnetic elements overlaps multiple first magnetic elements for all positions of the stage relative to the stator, with one magnet overlapping multiple windings for one preferred embodiment of the invention and two magnets on the stage overlapping multiple windings on the stator for a second embodiment. The windings form a linear motor providing forces in both a corresponding long travel dimension and in a dimension perpendicular to both long travel dimensions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

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Works referenced in this record:

Design of permanent multipole magnets with oriented rare earth cobalt material
journal, February 1980


Magnet arrays for synchronous machines
conference, January 1993


Study of a basic structure of surface actuator
journal, January 1989


Application of permanent magnets in accelerators and electron storage rings (invited)
journal, April 1985


Step-and-scan lithography using reduction optics
journal, November 1989