Rigid thin windows for vacuum applications
Abstract
A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.
- Inventors:
-
- Danville, CA
- Livermore, CA
- Lafayette, CA
- Pacific Palisades, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 872758
- Patent Number(s):
- 6002202
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- rigid; windows; vacuum; applications; window; stands; atmospheric; pressure; fabricated; photolithographic; wet; chemical; etching; techniques; comprises; layers; etch; stop; layer; protective; barrier; structure; series; support; ribs; running; width; typically; boron-doped; silicon; nitride; useful; instruments; electron; beam; guns; x-ray; detectors; gun; impede; electrons; demonstrated; outstanding; performance; survivability; tube; manufacturing; process; etch stop; x-ray detector; manufacturing process; chemical etching; top layer; silicon nitride; electron beam; atmospheric pressure; barrier layer; doped silicon; wet chemical; stop layer; protective barrier; etching techniques; beam gun; ray detector; vacuum applications; window structure; /313/378/
Citation Formats
Meyer, Glenn Allyn, Ciarlo, Dino R, Myers, Booth Richard, Chen, Hao-Lin, and Wakalopulos, George. Rigid thin windows for vacuum applications. United States: N. p., 1999.
Web.
Meyer, Glenn Allyn, Ciarlo, Dino R, Myers, Booth Richard, Chen, Hao-Lin, & Wakalopulos, George. Rigid thin windows for vacuum applications. United States.
Meyer, Glenn Allyn, Ciarlo, Dino R, Myers, Booth Richard, Chen, Hao-Lin, and Wakalopulos, George. Fri .
"Rigid thin windows for vacuum applications". United States. https://www.osti.gov/servlets/purl/872758.
@article{osti_872758,
title = {Rigid thin windows for vacuum applications},
author = {Meyer, Glenn Allyn and Ciarlo, Dino R and Myers, Booth Richard and Chen, Hao-Lin and Wakalopulos, George},
abstractNote = {A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}
Works referenced in this record:
Electron window cathode ray tube applications
journal, January 1986
- Hanlon, L.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 4, Issue 1