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Title: Apparatus and method for sensing motion in a microelectro-mechanical system

Abstract

An apparatus and method are disclosed for optically sensing motion in a microelectromechanical system (also termed a MEMS device) formed by surface micromachining or LIGA. The apparatus operates by reflecting or scattering a light beam off a corrugated surface (e.g. gear teeth or a reference feature) of a moveable member (e.g. a gear, rack or linkage) within the MEMS device and detecting the reflected or scattered light. The apparatus can be used to characterize a MEMS device, measuring one or more performance characteristic such as spring and damping coefficients, torque and friction, or uniformity of motion of the moveable member. The apparatus can also be used to determine the direction and extent of motion of the moveable member; or to determine a particular mechanical state that a MEMS device is in. Finally, the apparatus and method can be used for providing feedback to the MEMS device to improve performance and reliability.

Inventors:
 [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
872691
Patent Number(s):
5990473
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01D - MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
apparatus; method; sensing; motion; microelectro-mechanical; disclosed; optically; microelectromechanical; termed; mems; device; formed; surface; micromachining; liga; operates; reflecting; scattering; light; beam; corrugated; gear; teeth; reference; feature; moveable; rack; linkage; detecting; reflected; scattered; characterize; measuring; performance; characteristic; spring; damping; coefficients; torque; friction; uniformity; determine; direction; extent; particular; mechanical; finally; providing; feedback; improve; reliability; gear teeth; scattered light; light beam; surface micromachining; mems device; improve performance; sensing motion; performance characteristic; /250/

Citation Formats

Dickey, Fred M, and Holswade, Scott C. Apparatus and method for sensing motion in a microelectro-mechanical system. United States: N. p., 1999. Web.
Dickey, Fred M, & Holswade, Scott C. Apparatus and method for sensing motion in a microelectro-mechanical system. United States.
Dickey, Fred M, and Holswade, Scott C. Fri . "Apparatus and method for sensing motion in a microelectro-mechanical system". United States. https://www.osti.gov/servlets/purl/872691.
@article{osti_872691,
title = {Apparatus and method for sensing motion in a microelectro-mechanical system},
author = {Dickey, Fred M and Holswade, Scott C},
abstractNote = {An apparatus and method are disclosed for optically sensing motion in a microelectromechanical system (also termed a MEMS device) formed by surface micromachining or LIGA. The apparatus operates by reflecting or scattering a light beam off a corrugated surface (e.g. gear teeth or a reference feature) of a moveable member (e.g. a gear, rack or linkage) within the MEMS device and detecting the reflected or scattered light. The apparatus can be used to characterize a MEMS device, measuring one or more performance characteristic such as spring and damping coefficients, torque and friction, or uniformity of motion of the moveable member. The apparatus can also be used to determine the direction and extent of motion of the moveable member; or to determine a particular mechanical state that a MEMS device is in. Finally, the apparatus and method can be used for providing feedback to the MEMS device to improve performance and reliability.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

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Works referenced in this record:

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