Conductive metal oxide film and method of making

Exarhos, Gregory J

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Title: Conductive metal oxide film and method of making

Abstract

The present invention is a method for reducing a dopant in a film of a metal oxide wherein the dopant is reduced and the first metal oxide is substantially not reduced. The method of the present invention relies upon exposing the film to reducing conditions for a predetermined time and reducing a valence of the metal from a positive valence to a zero valence and maintaining atoms with a zero valence in an atomic configuration within the lattice structure of the metal oxide. According to the present invention, exposure to reducing conditions may be achieved electrochemically or achieved in an elevated temperature gas phase.

Inventors:

Windisch, Jr., Charles F. ^[1]; Exarhos, Gregory J ^[2]

(Kennewick, WA)
Richland, WA

Issue Date:: 1999-01-01

Research Org.:: Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)

OSTI Identifier:: 872690

Patent Number(s):: 5990416

Assignee:: Battelle Memorial Institute (Richland, WA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/1884 - {Manufacture of transparent electrodes, e.g. TCO, ITO}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/50 - Photovoltaic [PV] energy

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DOE Contract Number:: AC06-76RL01830

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: conductive; metal; oxide; film; method; reducing; dopant; reduced; substantially; relies; exposing; conditions; predetermined; time; valence; positive; zero; maintaining; atoms; atomic; configuration; lattice; structure; according; exposure; achieved; electrochemically; elevated; temperature; gas; phase; temperature gas; predetermined time; gas phase; metal oxide; elevated temperature; oxide film; conductive metal; lattice structure; reducing conditions; positive valence; determined time; /136/438/

Citation Formats


                    Windisch, Jr., Charles F., and Exarhos, Gregory J. Conductive metal oxide film and method of making.  United States: N. p., 1999. 
        Web.

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                    Windisch, Jr., Charles F., & Exarhos, Gregory J. Conductive metal oxide film and method of making.  United States.

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                    Windisch, Jr., Charles F., and Exarhos, Gregory J. Fri .  
        "Conductive metal oxide film and method of making".  United States.  https://www.osti.gov/servlets/purl/872690.

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@article{osti_872690,

  title        = {Conductive metal oxide film and method of making},

  author       = {Windisch, Jr., Charles F. and Exarhos, Gregory J},

  abstractNote = {The present invention is a method for reducing a dopant in a film of a metal oxide wherein the dopant is reduced and the first metal oxide is substantially not reduced. The method of the present invention relies upon exposing the film to reducing conditions for a predetermined time and reducing a valence of the metal from a positive valence to a zero valence and maintaining atoms with a zero valence in an atomic configuration within the lattice structure of the metal oxide. According to the present invention, exposure to reducing conditions may be achieved electrochemically or achieved in an elevated temperature gas phase.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1999},

  month        = {1}

}

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Works referenced in this record:

The Influence of Preparation on Semiconducting Rutile ( TiO2 )
journal, May 1980

Harris, L. A.; Schumacher, R.
Journal of The Electrochemical Society, Vol. 127, Issue 5
https://doi.org/10.1149/1.2129844

Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
journal, August 1985

Minami, Tadatsugu; Nanto, Hidehito; Takata, Shinzo
Japanese Journal of Applied Physics, Vol. 24, Issue Part 2, No. 8
https://doi.org/10.1143/JJAP.24.L605

Electrochemically Reduced Polycrystalline Tin Oxide Thin Films: Surface Analysis and Electroplated Copper Adhesion
journal, June 1996

Feng, H.; Laverty, S. J.; Maguire, P.
Journal of The Electrochemical Society, Vol. 143, Issue 6
https://doi.org/10.1149/1.1836947

Reduction of CO[sub 2] on Fluorine-Doped SnO[sub 2] Thin-Film Electrodes
journal, January 1992

Shiratsuchi, R.
Journal of The Electrochemical Society, Vol. 139, Issue 9
https://doi.org/10.1149/1.2221260

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Similar Records

Title: Conductive metal oxide film and method of making

Abstract

Citation Formats

The Influence of Preparation on Semiconducting Rutile ( TiO2 ) journal, May 1980

Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering journal, August 1985

Electrochemically Reduced Polycrystalline Tin Oxide Thin Films: Surface Analysis and Electroplated Copper Adhesion journal, June 1996

Reduction of CO[sub 2] on Fluorine-Doped SnO[sub 2] Thin-Film Electrodes journal, January 1992

The Influence of Preparation on Semiconducting Rutile ( TiO2 )
journal, May 1980

Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
journal, August 1985

Electrochemically Reduced Polycrystalline Tin Oxide Thin Films: Surface Analysis and Electroplated Copper Adhesion
journal, June 1996

Reduction of CO[sub 2] on Fluorine-Doped SnO[sub 2] Thin-Film Electrodes
journal, January 1992