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Title: Smooth diamond films as low friction, long wear surfaces

Abstract

An article and method of manufacture of a nanocrystalline diamond film. The nanocrystalline film is prepared by forming a carbonaceous vapor, providing an inert gas containing gas stream and combining the gas stream with the carbonaceous containing vapor. A plasma of the combined vapor and gas stream is formed in a chamber and fragmented carbon species are deposited onto a substrate to form the nanocrystalline diamond film having a root mean square flatness of about 50 nm deviation from flatness in the as deposited state.

Inventors:
 [1];  [2];  [2];  [3];  [4]
  1. Downers Grove, IL
  2. Naperville, IL
  3. Woodridge, IL
  4. LaGrange, IL
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
OSTI Identifier:
872685
Patent Number(s):
5989511
Assignee:
University of Chicago (Chicago, IL)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
smooth; diamond; films; friction; wear; surfaces; article; method; manufacture; nanocrystalline; film; prepared; forming; carbonaceous; vapor; providing; inert; gas; containing; stream; combining; plasma; combined; formed; chamber; fragmented; carbon; species; deposited; substrate; form; root; mean; square; flatness; 50; nm; deviation; gas containing; gas stream; inert gas; containing gas; diamond film; diamond films; carbonaceous vapor; root mean; nanocrystalline diamond; wear surface; carbon species; mean square; wear surfaces; containing vapor; /423/117/

Citation Formats

Gruen, Dieter M, Krauss, Alan R, Erdemir, Ali, Bindal, Cuma, and Zuiker, Christopher D. Smooth diamond films as low friction, long wear surfaces. United States: N. p., 1999. Web.
Gruen, Dieter M, Krauss, Alan R, Erdemir, Ali, Bindal, Cuma, & Zuiker, Christopher D. Smooth diamond films as low friction, long wear surfaces. United States.
Gruen, Dieter M, Krauss, Alan R, Erdemir, Ali, Bindal, Cuma, and Zuiker, Christopher D. Fri . "Smooth diamond films as low friction, long wear surfaces". United States. https://www.osti.gov/servlets/purl/872685.
@article{osti_872685,
title = {Smooth diamond films as low friction, long wear surfaces},
author = {Gruen, Dieter M and Krauss, Alan R and Erdemir, Ali and Bindal, Cuma and Zuiker, Christopher D},
abstractNote = {An article and method of manufacture of a nanocrystalline diamond film. The nanocrystalline film is prepared by forming a carbonaceous vapor, providing an inert gas containing gas stream and combining the gas stream with the carbonaceous containing vapor. A plasma of the combined vapor and gas stream is formed in a chamber and fragmented carbon species are deposited onto a substrate to form the nanocrystalline diamond film having a root mean square flatness of about 50 nm deviation from flatness in the as deposited state.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

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Works referenced in this record:

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