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Title: Deformable mirror for short wavelength applications

Abstract

A deformable mirror compatible with short wavelength (extreme ultraviolet) radiation that can be precisely controlled to nanometer and subnanometer accuracy is described. Actuators are coupled between a reaction plate and a face plate which has a reflective coating. A control system adjusts the voltage supplied to the actuators; by coordinating the voltages supplied to the actuators, the reflective surface of the mirror can be deformed to correct for dimensional errors in the mirror or to produce a desired contour.

Inventors:
 [1];  [2]
  1. 2417 Kilkare Rd., Sunol, CA 94586
  2. 5020 Canyon Crest Dr., San Ramon, CA 94583
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
872678
Patent Number(s):
5986795
Assignee:
Chapman, Henry N. (2417 Kilkare Rd., Sunol, CA 94586);Sweeney, Donald W. (5020 Canyon Crest Dr., San Ramon, CA 94583)
Patent Classifications (CPCs):
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
deformable; mirror; wavelength; applications; compatible; extreme; ultraviolet; radiation; precisely; controlled; nanometer; subnanometer; accuracy; described; actuators; coupled; reaction; plate; reflective; coating; control; adjusts; voltage; supplied; coordinating; voltages; surface; deformed; correct; dimensional; errors; produce; desired; contour; reflective coating; deformable mirror; extreme ultraviolet; reflective surface; voltage supplied; precisely controlled; precisely control; /359/

Citation Formats

Chapman, Henry N, and Sweeney, Donald W. Deformable mirror for short wavelength applications. United States: N. p., 1999. Web.
Chapman, Henry N, & Sweeney, Donald W. Deformable mirror for short wavelength applications. United States.
Chapman, Henry N, and Sweeney, Donald W. Fri . "Deformable mirror for short wavelength applications". United States. https://www.osti.gov/servlets/purl/872678.
@article{osti_872678,
title = {Deformable mirror for short wavelength applications},
author = {Chapman, Henry N and Sweeney, Donald W},
abstractNote = {A deformable mirror compatible with short wavelength (extreme ultraviolet) radiation that can be precisely controlled to nanometer and subnanometer accuracy is described. Actuators are coupled between a reaction plate and a face plate which has a reflective coating. A control system adjusts the voltage supplied to the actuators; by coordinating the voltages supplied to the actuators, the reflective surface of the mirror can be deformed to correct for dimensional errors in the mirror or to produce a desired contour.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

Patent:

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