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Title: Two modulator generalized ellipsometer for complete mueller matrix measurement

Abstract

A two-modulator generalized ellipsometer (2-MGE) comprising two polarizer-photoelastic modulator (PEM) pairs, an optical light source, an optical detection system, and associated data processing and control electronics, where the PEMs are free-running. The input light passes through the first polarizer-PEM pair, reflects off the sample surface or passes through the sample, passes through the second PEM-polarizer pair, and is detected. Each PEM is free running and operates at a different resonant frequency, e.g., 50 and 60 kHz. The resulting time-dependent waveform of the light intensity is a complicated function of time, and depends upon the exact operating frequency and phase of each PEM, the sample, and the azimuthal angles of the polarizer-PEM pairs, but can be resolved into a dc component and eight periodic components. In one embodiment, the waveform is analyzed using a new spectral analysis technique that is similar to Fourier analysis to determine eight sample Mueller matrix elements (normalized to the m.sub.00 Mueller matrix element). The other seven normalized elements of the general 4.times.4 Mueller matrix can be determined by changing the azimuthal angles of the PEM-polarizer pairs with respect to the plane of incidence. Since this instrument can measure all elements of the sample Mueller matrix, itmore » is much more powerful than standard ellipsometers.« less

Inventors:
 [1];  [2]
  1. (Oak Ridge, TN)
  2. Oak Ridge, TN
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
872530
Patent Number(s):
5956147
Assignee:
Lockheed Martin Energy Research Corporation ()
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
modulator; generalized; ellipsometer; complete; mueller; matrix; measurement; two-modulator; 2-mge; comprising; polarizer-photoelastic; pem; pairs; optical; light; source; detection; associated; data; processing; control; electronics; pems; free-running; input; passes; polarizer-pem; pair; reflects; sample; surface; pem-polarizer; detected; free; running; operates; resonant; frequency; 50; 60; khz; resulting; time-dependent; waveform; intensity; complicated; function; time; depends; exact; operating; phase; azimuthal; angles; resolved; dc; component; eight; periodic; components; embodiment; analyzed; spectral; analysis; technique; similar; fourier; determine; elements; normalized; 00; element; seven; times; determined; changing; respect; plane; incidence; instrument; measure; powerful; standard; ellipsometers; mueller matrix; sample surface; optical detection; operating frequency; light passes; spectral analysis; input light; resonant frequency; data processing; light source; light intensity; optical light; analysis technique; generalized ellipsometer; modulator generalized; matrix elements; dc component; /356/

Citation Formats

Jellison, Jr., Gerald E., and Modine, Frank A. Two modulator generalized ellipsometer for complete mueller matrix measurement. United States: N. p., 1999. Web.
Jellison, Jr., Gerald E., & Modine, Frank A. Two modulator generalized ellipsometer for complete mueller matrix measurement. United States.
Jellison, Jr., Gerald E., and Modine, Frank A. Fri . "Two modulator generalized ellipsometer for complete mueller matrix measurement". United States. https://www.osti.gov/servlets/purl/872530.
@article{osti_872530,
title = {Two modulator generalized ellipsometer for complete mueller matrix measurement},
author = {Jellison, Jr., Gerald E. and Modine, Frank A},
abstractNote = {A two-modulator generalized ellipsometer (2-MGE) comprising two polarizer-photoelastic modulator (PEM) pairs, an optical light source, an optical detection system, and associated data processing and control electronics, where the PEMs are free-running. The input light passes through the first polarizer-PEM pair, reflects off the sample surface or passes through the sample, passes through the second PEM-polarizer pair, and is detected. Each PEM is free running and operates at a different resonant frequency, e.g., 50 and 60 kHz. The resulting time-dependent waveform of the light intensity is a complicated function of time, and depends upon the exact operating frequency and phase of each PEM, the sample, and the azimuthal angles of the polarizer-PEM pairs, but can be resolved into a dc component and eight periodic components. In one embodiment, the waveform is analyzed using a new spectral analysis technique that is similar to Fourier analysis to determine eight sample Mueller matrix elements (normalized to the m.sub.00 Mueller matrix element). The other seven normalized elements of the general 4.times.4 Mueller matrix can be determined by changing the azimuthal angles of the PEM-polarizer pairs with respect to the plane of incidence. Since this instrument can measure all elements of the sample Mueller matrix, it is much more powerful than standard ellipsometers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

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Works referenced in this record:

Fast polarization modulated ellipsometer using a microprocessor system for digital Fourier analysis
journal, July 1982


Two-channel polarization modulation ellipsometer
journal, January 1990


Recent developments in instrumentation in ellipsometry
journal, June 1980


An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique
journal, June 1969


Measurement of Mueller matrices
journal, January 1992