Method and apparatus for fabrication of high gradient insulators with parallel surface conductors spaced less than one millimeter apart
Abstract
Optical patterns and lithographic techniques are used as part of a process to embed parallel and evenly spaced conductors in the non-planar surfaces of an insulator to produce high gradient insulators. The approach extends the size that high gradient insulating structures can be fabricated as well as improves the performance of those insulators by reducing the scale of the alternating parallel lines of insulator and conductor along the surface. This fabrication approach also substantially decreases the cost required to produce high gradient insulators.
- Inventors:
-
- Livermore, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 872525
- Patent Number(s):
- 5955221
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; apparatus; fabrication; gradient; insulators; parallel; surface; conductors; spaced; millimeter; apart; optical; patterns; lithographic; techniques; process; embed; non-planar; surfaces; insulator; produce; approach; extends; size; insulating; structures; fabricated; improves; performance; reducing; scale; alternating; lines; conductor; substantially; decreases; cost; required; planar surfaces; planar surface; parallel lines; conductors spaced; optical pattern; parallel surface; /430/359/361/
Citation Formats
Sanders, David M, and Decker, Derek E. Method and apparatus for fabrication of high gradient insulators with parallel surface conductors spaced less than one millimeter apart. United States: N. p., 1999.
Web.
Sanders, David M, & Decker, Derek E. Method and apparatus for fabrication of high gradient insulators with parallel surface conductors spaced less than one millimeter apart. United States.
Sanders, David M, and Decker, Derek E. Fri .
"Method and apparatus for fabrication of high gradient insulators with parallel surface conductors spaced less than one millimeter apart". United States. https://www.osti.gov/servlets/purl/872525.
@article{osti_872525,
title = {Method and apparatus for fabrication of high gradient insulators with parallel surface conductors spaced less than one millimeter apart},
author = {Sanders, David M and Decker, Derek E},
abstractNote = {Optical patterns and lithographic techniques are used as part of a process to embed parallel and evenly spaced conductors in the non-planar surfaces of an insulator to produce high gradient insulators. The approach extends the size that high gradient insulating structures can be fabricated as well as improves the performance of those insulators by reducing the scale of the alternating parallel lines of insulator and conductor along the surface. This fabrication approach also substantially decreases the cost required to produce high gradient insulators.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}