Uncooled thin film pyroelectric IR detector with aerogel thermal isolation
Abstract
A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr.sub.0.4 Ti.sub.0.6)O.sub.3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550.degree. C.
- Inventors:
-
- Albuquerque, NM
- Seneca, SC
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 872504
- Patent Number(s):
- 5949071
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- uncooled; film; pyroelectric; detector; aerogel; thermal; isolation; monolithic; infrared; structure; allows; integration; films; atop; conductivity; comprises; bottom; top; substrate; insulating; layer; electrode; upper; capped; blacking; offer; air; providing; stronger; alternative; cantilevered; suspended; air-gap; structures; pixel; arrays; pb; zr; deposited; displayed; viable; properties; processed; 550; degree; infrared detector; films deposited; thermal conductivity; insulating layer; pixel array; structure comprises; thermal isolation; electrode layer; aerogel insulating; /250/
Citation Formats
Ruffner, Judith A, Bullington, Jeff A, Clem, Paul G, Warren, William L, Brinker, C Jeffrey, Tuttle, Bruce A, and Schwartz, Robert W. Uncooled thin film pyroelectric IR detector with aerogel thermal isolation. United States: N. p., 1999.
Web.
Ruffner, Judith A, Bullington, Jeff A, Clem, Paul G, Warren, William L, Brinker, C Jeffrey, Tuttle, Bruce A, & Schwartz, Robert W. Uncooled thin film pyroelectric IR detector with aerogel thermal isolation. United States.
Ruffner, Judith A, Bullington, Jeff A, Clem, Paul G, Warren, William L, Brinker, C Jeffrey, Tuttle, Bruce A, and Schwartz, Robert W. Fri .
"Uncooled thin film pyroelectric IR detector with aerogel thermal isolation". United States. https://www.osti.gov/servlets/purl/872504.
@article{osti_872504,
title = {Uncooled thin film pyroelectric IR detector with aerogel thermal isolation},
author = {Ruffner, Judith A and Bullington, Jeff A and Clem, Paul G and Warren, William L and Brinker, C Jeffrey and Tuttle, Bruce A and Schwartz, Robert W},
abstractNote = {A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr.sub.0.4 Ti.sub.0.6)O.sub.3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550.degree. C.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}
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