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Title: Uncooled thin film pyroelectric IR detector with aerogel thermal isolation

Abstract

A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr.sub.0.4 Ti.sub.0.6)O.sub.3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550.degree. C.

Inventors:
 [1];  [1];  [1];  [1];  [1];  [1];  [2]
  1. (Albuquerque, NM)
  2. (Seneca, SC)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
872504
Patent Number(s):
5949071
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
uncooled; film; pyroelectric; detector; aerogel; thermal; isolation; monolithic; infrared; structure; allows; integration; films; atop; conductivity; comprises; bottom; top; substrate; insulating; layer; electrode; upper; capped; blacking; offer; air; providing; stronger; alternative; cantilevered; suspended; air-gap; structures; pixel; arrays; pb; zr; deposited; displayed; viable; properties; processed; 550; degree; infrared detector; films deposited; thermal conductivity; insulating layer; pixel array; structure comprises; thermal isolation; electrode layer; aerogel insulating; /250/

Citation Formats

Ruffner, Judith A., Bullington, Jeff A., Clem, Paul G., Warren, William L., Brinker, C. Jeffrey, Tuttle, Bruce A., and Schwartz, Robert W. Uncooled thin film pyroelectric IR detector with aerogel thermal isolation. United States: N. p., 1999. Web.
Ruffner, Judith A., Bullington, Jeff A., Clem, Paul G., Warren, William L., Brinker, C. Jeffrey, Tuttle, Bruce A., & Schwartz, Robert W. Uncooled thin film pyroelectric IR detector with aerogel thermal isolation. United States.
Ruffner, Judith A., Bullington, Jeff A., Clem, Paul G., Warren, William L., Brinker, C. Jeffrey, Tuttle, Bruce A., and Schwartz, Robert W. Fri . "Uncooled thin film pyroelectric IR detector with aerogel thermal isolation". United States. https://www.osti.gov/servlets/purl/872504.
@article{osti_872504,
title = {Uncooled thin film pyroelectric IR detector with aerogel thermal isolation},
author = {Ruffner, Judith A. and Bullington, Jeff A. and Clem, Paul G. and Warren, William L. and Brinker, C. Jeffrey and Tuttle, Bruce A. and Schwartz, Robert W.},
abstractNote = {A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr.sub.0.4 Ti.sub.0.6)O.sub.3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550.degree. C.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

Patent:

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