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Title: Uncooled thin film pyroelectric IR detector with aerogel thermal isolation

Abstract

A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr.sub.0.4 Ti.sub.0.6)O.sub.3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550.degree. C.

Inventors:
 [1];  [1];  [1];  [1];  [1];  [1];  [2]
  1. Albuquerque, NM
  2. Seneca, SC
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
872504
Patent Number(s):
5949071
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
uncooled; film; pyroelectric; detector; aerogel; thermal; isolation; monolithic; infrared; structure; allows; integration; films; atop; conductivity; comprises; bottom; top; substrate; insulating; layer; electrode; upper; capped; blacking; offer; air; providing; stronger; alternative; cantilevered; suspended; air-gap; structures; pixel; arrays; pb; zr; deposited; displayed; viable; properties; processed; 550; degree; infrared detector; films deposited; thermal conductivity; insulating layer; pixel array; structure comprises; thermal isolation; electrode layer; aerogel insulating; /250/

Citation Formats

Ruffner, Judith A, Bullington, Jeff A, Clem, Paul G, Warren, William L, Brinker, C Jeffrey, Tuttle, Bruce A, and Schwartz, Robert W. Uncooled thin film pyroelectric IR detector with aerogel thermal isolation. United States: N. p., 1999. Web.
Ruffner, Judith A, Bullington, Jeff A, Clem, Paul G, Warren, William L, Brinker, C Jeffrey, Tuttle, Bruce A, & Schwartz, Robert W. Uncooled thin film pyroelectric IR detector with aerogel thermal isolation. United States.
Ruffner, Judith A, Bullington, Jeff A, Clem, Paul G, Warren, William L, Brinker, C Jeffrey, Tuttle, Bruce A, and Schwartz, Robert W. Fri . "Uncooled thin film pyroelectric IR detector with aerogel thermal isolation". United States. https://www.osti.gov/servlets/purl/872504.
@article{osti_872504,
title = {Uncooled thin film pyroelectric IR detector with aerogel thermal isolation},
author = {Ruffner, Judith A and Bullington, Jeff A and Clem, Paul G and Warren, William L and Brinker, C Jeffrey and Tuttle, Bruce A and Schwartz, Robert W},
abstractNote = {A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr.sub.0.4 Ti.sub.0.6)O.sub.3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550.degree. C.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

Patent:

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