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Title: Method of depositing multi-layer carbon-based coatings for field emission

Abstract

A novel field emitter device for cold cathode field emission applications, comprising a multi-layer resistive carbon film. The multi-layered film of the present invention is comprised of at least two layers of a resistive carbon material, preferably amorphous-tetrahedrally coordinated carbon, such that the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure comprises a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film comprises a plurality of carbon layers, wherein adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced. Field emitters made according the present invention display improved electron emission characteristics in comparison to conventional field emitter materials.

Inventors:
 [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
872437
Patent Number(s):
5935639
Assignee:
Sandia Corporation (Livermore, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; depositing; multi-layer; carbon-based; coatings; field; emission; novel; emitter; device; cold; cathode; applications; comprising; resistive; carbon; film; multi-layered; comprised; layers; material; preferably; amorphous-tetrahedrally; coordinated; resistivities; adjacent; electron; surface; preferred; structure; comprises; top; layer; resistivity; bottom; edge; emitting; structures; plurality; selection; deposition; conditions; including; energy; species; presence; absence; elements; inert; gases; boron; desired; produced; emitters; according; display; improved; characteristics; comparison; conventional; materials; inert gases; emitter material; electron emission; cold cathode; top layer; inert gas; field emission; carbon film; field emitter; carbon layer; film comprises; field emitters; carbon material; adjacent layers; structure comprises; resistive carbon; depositing carbon; carbon species; multi-layered film; multi-layer resistive; multi-layer carbon-based; novel field; cathode field; emission characteristics; deposition conditions; improved electron; emitter materials; emitter device; emission applications; carbon-based coatings; coordinated carbon; /427/

Citation Formats

Sullivan, John P, and Friedmann, Thomas A. Method of depositing multi-layer carbon-based coatings for field emission. United States: N. p., 1999. Web.
Sullivan, John P, & Friedmann, Thomas A. Method of depositing multi-layer carbon-based coatings for field emission. United States.
Sullivan, John P, and Friedmann, Thomas A. Fri . "Method of depositing multi-layer carbon-based coatings for field emission". United States. https://www.osti.gov/servlets/purl/872437.
@article{osti_872437,
title = {Method of depositing multi-layer carbon-based coatings for field emission},
author = {Sullivan, John P and Friedmann, Thomas A},
abstractNote = {A novel field emitter device for cold cathode field emission applications, comprising a multi-layer resistive carbon film. The multi-layered film of the present invention is comprised of at least two layers of a resistive carbon material, preferably amorphous-tetrahedrally coordinated carbon, such that the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure comprises a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film comprises a plurality of carbon layers, wherein adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced. Field emitters made according the present invention display improved electron emission characteristics in comparison to conventional field emitter materials.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

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Works referenced in this record:

Diamond‐like carbon films prepared with a laser ion source
journal, July 1988


Electron emission from chemical vapor deposited diamond and dielectric breakdown
journal, August 1994