Microlens frames for laser diode arrays
Abstract
Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter.
- Inventors:
-
- Livermore, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 872388
- Patent Number(s):
- 5923481
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01S - DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- microlens; frames; laser; diode; arrays; monolithic; enable; fabrication; manufactured; inexpensively; registration; inherent; focal; length; compensation; lens; diameter; variation; substrate; fabricate; low-cost; array; wet-etched; sawed; series; v-grooves; created; wet-etching; exploiting; etch-rate; selectivity; crystal; planes; provide; support; frame; cylindrical; custom-shaped; microlenses; formed; photolithographic; semiconductor; batch-processing; techniques; precise; lateral; vertical; v-groove; advantage; preserving; correct; focus; lenses; varying; diode arrays; crystal plane; crystal planes; focal length; support frame; laser diode; diode array; processing techniques; microlens frames; monolithic laser; lens frame; processing technique; lens array; /359/385/
Citation Formats
Skidmore, Jay A, and Freitas, Barry L. Microlens frames for laser diode arrays. United States: N. p., 1999.
Web.
Skidmore, Jay A, & Freitas, Barry L. Microlens frames for laser diode arrays. United States.
Skidmore, Jay A, and Freitas, Barry L. Fri .
"Microlens frames for laser diode arrays". United States. https://www.osti.gov/servlets/purl/872388.
@article{osti_872388,
title = {Microlens frames for laser diode arrays},
author = {Skidmore, Jay A and Freitas, Barry L},
abstractNote = {Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1999},
month = {Fri Jan 01 00:00:00 EST 1999}
}