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Title: Measurement of the curvature of a surface using parallel light beams

Abstract

Apparatus for measuring curvature of a surface wherein a beam of collimated light is passed through means for producing a plurality of parallel light beams each separated by a common distance which then reflect off the surface to fall upon a detector that measures the separation of the reflected beams of light. This means can be an etalon and the combination of a diffractive element and a converging lens. The curvature of the surface along the line onto which the multiple beams fall can be calculated from this information. A two-dimensional map of the curvature can be obtained by adding a second etalon (or a second combination of a diffractive element and a converging lens) which is rotated 90.degree. about the optical axis relative to the first etalon and inclined at the same angle. The second etalon creates an individual set of parallel light beams from each of the individual beams created by the first etalon with the sets of parallel light beams from the second etalon rotated 90.degree. relative to the line onto which the single set of parallel beams from the first etalon would have fallen.

Inventors:
 [1];  [2];  [3];  [3]
  1. Sandia Park, NM
  2. Edgewood, NM
  3. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
872334
Patent Number(s):
5912738
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
measurement; curvature; surface; parallel; light; beams; apparatus; measuring; beam; collimated; passed; means; producing; plurality; separated; common; distance; reflect; fall; detector; measures; separation; reflected; etalon; combination; diffractive; element; converging; lens; line; multiple; calculated; information; two-dimensional; map; obtained; adding; rotated; 90; degree; optical; axis; relative; inclined; angle; creates; individual; set; created; sets; single; fallen; parallel beams; collimated light; parallel light; optical axis; light beam; light beams; diffractive element; reflected beam; active element; multiple beams; single set; converging lens; multiple beam; dual beam; /356/

Citation Formats

Chason, Eric H, Floro, Jerrold A, Seager, Carleton H, and Sinclair, Michael B. Measurement of the curvature of a surface using parallel light beams. United States: N. p., 1999. Web.
Chason, Eric H, Floro, Jerrold A, Seager, Carleton H, & Sinclair, Michael B. Measurement of the curvature of a surface using parallel light beams. United States.
Chason, Eric H, Floro, Jerrold A, Seager, Carleton H, and Sinclair, Michael B. Fri . "Measurement of the curvature of a surface using parallel light beams". United States. https://www.osti.gov/servlets/purl/872334.
@article{osti_872334,
title = {Measurement of the curvature of a surface using parallel light beams},
author = {Chason, Eric H and Floro, Jerrold A and Seager, Carleton H and Sinclair, Michael B},
abstractNote = {Apparatus for measuring curvature of a surface wherein a beam of collimated light is passed through means for producing a plurality of parallel light beams each separated by a common distance which then reflect off the surface to fall upon a detector that measures the separation of the reflected beams of light. This means can be an etalon and the combination of a diffractive element and a converging lens. The curvature of the surface along the line onto which the multiple beams fall can be calculated from this information. A two-dimensional map of the curvature can be obtained by adding a second etalon (or a second combination of a diffractive element and a converging lens) which is rotated 90.degree. about the optical axis relative to the first etalon and inclined at the same angle. The second etalon creates an individual set of parallel light beams from each of the individual beams created by the first etalon with the sets of parallel light beams from the second etalon rotated 90.degree. relative to the line onto which the single set of parallel beams from the first etalon would have fallen.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

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Works referenced in this record:

Mechanical stresses in (sub)monolayer epitaxial films
journal, February 1990