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Title: Liquid injection plasma deposition method and apparatus

Abstract

A liquid injection plasma torch deposition apparatus for depositing material onto a surface of a substrate may comprise a plasma torch for producing a jet of plasma from an outlet nozzle. A plasma confinement tube having an inlet end and an outlet end and a central bore therethrough is aligned with the outlet nozzle of the plasma torch so that the plasma jet is directed into the inlet end of the plasma confinement tube and emerges from the outlet end of the plasma confinement tube. The plasma confinement tube also includes an injection port transverse to the central bore. A liquid injection device connected to the injection port of the plasma confinement tube injects a liquid reactant mixture containing the material to be deposited onto the surface of the substrate through the injection port and into the central bore of the plasma confinement tube.

Inventors:
 [1];  [1]
  1. (Idaho Falls, ID)
Issue Date:
Research Org.:
Idaho National Engineering and Environmental Laboratory, Idaho Falls, ID
OSTI Identifier:
872299
Patent Number(s):
5906757
Assignee:
Lockheed Martin Idaho Technologies Company (Idaho Falls, ID) INEEL
DOE Contract Number:  
AC07-94ID13223
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
liquid; injection; plasma; deposition; method; apparatus; torch; depositing; material; surface; substrate; comprise; producing; jet; outlet; nozzle; confinement; tube; inlet; central; bore; therethrough; aligned; directed; emerges; transverse; device; connected; injects; reactant; mixture; containing; deposited; reactant mixture; bore therethrough; depositing material; deposition method; mixture containing; plasma confinement; plasma torch; central bore; plasma deposition; outlet nozzle; plasma jet; deposition apparatus; liquid injection; device connected; injection device; liquid reactant; injection plasma; /219/427/

Citation Formats

Kong, Peter C., and Watkins, Arthur D. Liquid injection plasma deposition method and apparatus. United States: N. p., 1999. Web.
Kong, Peter C., & Watkins, Arthur D. Liquid injection plasma deposition method and apparatus. United States.
Kong, Peter C., and Watkins, Arthur D. Fri . "Liquid injection plasma deposition method and apparatus". United States. https://www.osti.gov/servlets/purl/872299.
@article{osti_872299,
title = {Liquid injection plasma deposition method and apparatus},
author = {Kong, Peter C. and Watkins, Arthur D.},
abstractNote = {A liquid injection plasma torch deposition apparatus for depositing material onto a surface of a substrate may comprise a plasma torch for producing a jet of plasma from an outlet nozzle. A plasma confinement tube having an inlet end and an outlet end and a central bore therethrough is aligned with the outlet nozzle of the plasma torch so that the plasma jet is directed into the inlet end of the plasma confinement tube and emerges from the outlet end of the plasma confinement tube. The plasma confinement tube also includes an injection port transverse to the central bore. A liquid injection device connected to the injection port of the plasma confinement tube injects a liquid reactant mixture containing the material to be deposited onto the surface of the substrate through the injection port and into the central bore of the plasma confinement tube.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

Patent:

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