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Title: Near field optical probe for critical dimension measurements

Abstract

A resonant planar optical waveguide probe for measuring critical dimensions on an object in the range of 100 nm and below. The optical waveguide includes a central resonant cavity flanked by Bragg reflector layers with input and output means at either end. Light is supplied by a narrow bandwidth laser source. Light resonating in the cavity creates an evanescent electrical field. The object with the structures to be measured is translated past the resonant cavity. The refractive index contrasts presented by the structures perturb the field and cause variations in the intensity of the light in the cavity. The topography of the structures is determined from these variations.

Inventors:
 [1];  [2]
  1. (Albuquerque, NM)
  2. (Cambridge, MA)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
872293
Patent Number(s):
5905573
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
near; field; optical; probe; critical; dimension; measurements; resonant; planar; waveguide; measuring; dimensions; range; 100; nm; below; central; cavity; flanked; bragg; reflector; layers; input; output; means; light; supplied; narrow; bandwidth; laser; source; resonating; creates; evanescent; electrical; structures; measured; translated; past; refractive; index; contrasts; perturb; variations; intensity; topography; determined; narrow bandwidth; output means; bragg reflector; electrical field; refractive index; optical probe; laser source; resonant cavity; optical waveguide; critical dimension; narrow band; near field; optical wave; bandwidth laser; planar optical; critical dimensions; /356/

Citation Formats

Stallard, Brian R., and Kaushik, Sumanth. Near field optical probe for critical dimension measurements. United States: N. p., 1999. Web.
Stallard, Brian R., & Kaushik, Sumanth. Near field optical probe for critical dimension measurements. United States.
Stallard, Brian R., and Kaushik, Sumanth. Fri . "Near field optical probe for critical dimension measurements". United States. https://www.osti.gov/servlets/purl/872293.
@article{osti_872293,
title = {Near field optical probe for critical dimension measurements},
author = {Stallard, Brian R. and Kaushik, Sumanth},
abstractNote = {A resonant planar optical waveguide probe for measuring critical dimensions on an object in the range of 100 nm and below. The optical waveguide includes a central resonant cavity flanked by Bragg reflector layers with input and output means at either end. Light is supplied by a narrow bandwidth laser source. Light resonating in the cavity creates an evanescent electrical field. The object with the structures to be measured is translated past the resonant cavity. The refractive index contrasts presented by the structures perturb the field and cause variations in the intensity of the light in the cavity. The topography of the structures is determined from these variations.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

Patent:

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