Method of improving field emission characteristics of diamond thin films
Abstract
A method of preparing diamond thin films with improved field emission properties. The method includes preparing a diamond thin film on a substrate, such as Mo, W, Si and Ni. An atmosphere of hydrogen (molecular or atomic) can be provided above the already deposited film to form absorbed hydrogen to reduce the work function and enhance field emission properties of the diamond film. In addition, hydrogen can be absorbed on intergranular surfaces to enhance electrical conductivity of the diamond film. The treated diamond film can be part of a microtip array in a flat panel display.
- Inventors:
-
- Naperville, IL
- Downer Grove, IL
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 872282
- Patent Number(s):
- 5902640
- Assignee:
- University of Chicago (Chicago, IL)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; improving; field; emission; characteristics; diamond; films; preparing; improved; properties; film; substrate; atmosphere; hydrogen; molecular; atomic; provided; deposited; form; absorbed; reduce; function; enhance; addition; intergranular; surfaces; electrical; conductivity; treated; microtip; array; flat; panel; display; field emission; electrical conductivity; diamond film; flat panel; panel display; emission characteristics; emission properties; deposited film; improved field; preparing diamond; /427/
Citation Formats
Krauss, Alan R, and Gruen, Dieter M. Method of improving field emission characteristics of diamond thin films. United States: N. p., 1999.
Web.
Krauss, Alan R, & Gruen, Dieter M. Method of improving field emission characteristics of diamond thin films. United States.
Krauss, Alan R, and Gruen, Dieter M. Fri .
"Method of improving field emission characteristics of diamond thin films". United States. https://www.osti.gov/servlets/purl/872282.
@article{osti_872282,
title = {Method of improving field emission characteristics of diamond thin films},
author = {Krauss, Alan R and Gruen, Dieter M},
abstractNote = {A method of preparing diamond thin films with improved field emission properties. The method includes preparing a diamond thin film on a substrate, such as Mo, W, Si and Ni. An atmosphere of hydrogen (molecular or atomic) can be provided above the already deposited film to form absorbed hydrogen to reduce the work function and enhance field emission properties of the diamond film. In addition, hydrogen can be absorbed on intergranular surfaces to enhance electrical conductivity of the diamond film. The treated diamond film can be part of a microtip array in a flat panel display.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}
Works referenced in this record:
Effects of potassium and lithium metal deposition on the emission characteristics of Spindt-type thin-film field emission microcathode arrays
journal, March 1995
- Talin, A. A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 13, Issue 2