Plasma mixing glow discharge device for analytical applications
Abstract
An instrument for analyzing a sample has an enclosure that forms a chamber containing an anode which divides the chamber into a discharge region and an analysis region. A gas inlet and outlet are provided to introduce and exhaust a rare gas into the discharge region. A cathode within the discharge region has a plurality of pins projecting in a geometric pattern toward the anode for exciting the gas and producing a plasma discharge between the cathode and the anode. Low energy electrons (e.g. <0.5 eV) pass into the analysis region through an aperture. The sample to be analyzed is placed into the analysis region and bombarded by the metastable rare gas atoms and the low energy electrons extracted into from the discharge region. A mass or optical spectrometer can be coupled to a port of the analysis region to analyze the resulting ions and light emission.
- Inventors:
-
- Knoxville, TN
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 872258
- Patent Number(s):
- 5896196
- Assignee:
- Lockheed Martin Energy Research Corporation (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC05-96OR22464
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- plasma; mixing; glow; discharge; device; analytical; applications; instrument; analyzing; sample; enclosure; forms; chamber; containing; anode; divides; region; analysis; gas; inlet; outlet; provided; introduce; exhaust; rare; cathode; plurality; pins; projecting; geometric; pattern; exciting; producing; energy; electrons; pass; aperture; analyzed; placed; bombarded; metastable; atoms; extracted; mass; optical; spectrometer; coupled; analyze; resulting; light; emission; optical spectrometer; analysis region; rare gas; light emission; energy electrons; plasma discharge; discharge region; discharge device; gas inlet; glow discharge; chamber containing; energy electron; gas atoms; geometric pattern; analytical applications; plasma mixing; /356/250/
Citation Formats
Pinnaduwage, Lal A. Plasma mixing glow discharge device for analytical applications. United States: N. p., 1999.
Web.
Pinnaduwage, Lal A. Plasma mixing glow discharge device for analytical applications. United States.
Pinnaduwage, Lal A. Fri .
"Plasma mixing glow discharge device for analytical applications". United States. https://www.osti.gov/servlets/purl/872258.
@article{osti_872258,
title = {Plasma mixing glow discharge device for analytical applications},
author = {Pinnaduwage, Lal A},
abstractNote = {An instrument for analyzing a sample has an enclosure that forms a chamber containing an anode which divides the chamber into a discharge region and an analysis region. A gas inlet and outlet are provided to introduce and exhaust a rare gas into the discharge region. A cathode within the discharge region has a plurality of pins projecting in a geometric pattern toward the anode for exciting the gas and producing a plasma discharge between the cathode and the anode. Low energy electrons (e.g. <0.5 eV) pass into the analysis region through an aperture. The sample to be analyzed is placed into the analysis region and bombarded by the metastable rare gas atoms and the low energy electrons extracted into from the discharge region. A mass or optical spectrometer can be coupled to a port of the analysis region to analyze the resulting ions and light emission.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1999},
month = {Fri Jan 01 00:00:00 EST 1999}
}
Works referenced in this record:
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