Three-dimensional architecture for solid state radiation detectors
Abstract
A radiation-damage resistant radiation detector is formed on a substrate formed of a material doped with a first conductivity type dopant. The detector includes at least one first electrode formed of first conductivity type dopant, and at least one second electrode that is spaced-apart from the first electrode and formed of a second conductivity type dopant. Each first and second electrode penetrates into the substrate from a substrate surface, and one or more electrodes may penetrate entirely through the substrate, that is traversing from one surface to the other surface. Particulate and/or electromagnetic radiation penetrating at least a surface of the substrate releases electrons and holes in substrate regions. Because the electrodes may be formed entirely through the substrate thickness, the released charges will be a relatively small distance from at least a portion of such an electrode, e.g., a distance less than the substrate thickness. The electrons and/or holes traverse the small distance and are collected by said electrodes, thus promoting rapid detection of the radiation. By providing one or more electrodes with a dopant profile radially graded in a direction parallel to a substrate surface, an electric field results that promotes rapid collection of released electrons and saidmore »
- Inventors:
-
- Berkeley, CA
- Issue Date:
- Research Org.:
- University of Hawaii (Honolulu, HI)
- OSTI Identifier:
- 872232
- Patent Number(s):
- 5889313
- Assignee:
- University of Hawaii (Honolulu, HI)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- FG03-94ER40833
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- three-dimensional; architecture; solid; radiation; detectors; radiation-damage; resistant; detector; formed; substrate; material; doped; conductivity; type; dopant; electrode; spaced-apart; penetrates; surface; electrodes; penetrate; entirely; traversing; particulate; electromagnetic; penetrating; releases; electrons; holes; regions; thickness; released; charges; relatively; distance; portion; traverse; collected; promoting; rapid; detection; providing; profile; radially; graded; direction; parallel; electric; field; results; promotes; collection; monolithic; combinations; fabricated; including; cmos; electronics; process; signals; rapid detection; substrate formed; substrate thickness; electromagnetic radiation; electric field; radiation detector; substrate surface; radiation detectors; conductivity type; electrode formed; direction parallel; substrate region; type dopant; radiation signal; material doped; /257/250/
Citation Formats
Parker, Sherwood. Three-dimensional architecture for solid state radiation detectors. United States: N. p., 1999.
Web.
Parker, Sherwood. Three-dimensional architecture for solid state radiation detectors. United States.
Parker, Sherwood. Fri .
"Three-dimensional architecture for solid state radiation detectors". United States. https://www.osti.gov/servlets/purl/872232.
@article{osti_872232,
title = {Three-dimensional architecture for solid state radiation detectors},
author = {Parker, Sherwood},
abstractNote = {A radiation-damage resistant radiation detector is formed on a substrate formed of a material doped with a first conductivity type dopant. The detector includes at least one first electrode formed of first conductivity type dopant, and at least one second electrode that is spaced-apart from the first electrode and formed of a second conductivity type dopant. Each first and second electrode penetrates into the substrate from a substrate surface, and one or more electrodes may penetrate entirely through the substrate, that is traversing from one surface to the other surface. Particulate and/or electromagnetic radiation penetrating at least a surface of the substrate releases electrons and holes in substrate regions. Because the electrodes may be formed entirely through the substrate thickness, the released charges will be a relatively small distance from at least a portion of such an electrode, e.g., a distance less than the substrate thickness. The electrons and/or holes traverse the small distance and are collected by said electrodes, thus promoting rapid detection of the radiation. By providing one or more electrodes with a dopant profile radially graded in a direction parallel to a substrate surface, an electric field results that promotes rapid collection of released electrons and said holes. Monolithic combinations of such detectors may be fabricated including CMOS electronics to process radiation signals.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}