skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Electrochemical formation of field emitters

Abstract

Electrochemical formation of field emitters, particularly useful in the fabrication of flat panel displays. The fabrication involves field emitting points in a gated field emitter structure. Metal field emitters are formed by electroplating and the shape of the formed emitter is controlled by the potential imposed on the gate as well as on a separate counter electrode. This allows sharp emitters to be formed in a more inexpensive and manufacturable process than vacuum deposition processes used at present. The fabrication process involves etching of the gate metal and the dielectric layer down to the resistor layer, and then electroplating the etched area and forming an electroplated emitter point in the etched area.

Inventors:
 [1]
  1. (Berkeley, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
872191
Patent Number(s):
5882503
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
electrochemical; formation; field; emitters; particularly; useful; fabrication; flat; panel; displays; involves; emitting; gated; emitter; structure; metal; formed; electroplating; shape; controlled; potential; imposed; gate; separate; counter; electrode; allows; sharp; inexpensive; manufacturable; process; vacuum; deposition; processes; etching; dielectric; layer; resistor; etched; forming; electroplated; vacuum deposition; dielectric layer; process involves; particularly useful; deposition process; counter electrode; fabrication process; field emitter; flat panel; field emitters; deposition processes; gate metal; panel displays; panel display; emitter structure; gated field; electrochemical formation; manufacturable process; /205/445/

Citation Formats

Bernhardt, Anthony F. Electrochemical formation of field emitters. United States: N. p., 1999. Web.
Bernhardt, Anthony F. Electrochemical formation of field emitters. United States.
Bernhardt, Anthony F. Fri . "Electrochemical formation of field emitters". United States. https://www.osti.gov/servlets/purl/872191.
@article{osti_872191,
title = {Electrochemical formation of field emitters},
author = {Bernhardt, Anthony F.},
abstractNote = {Electrochemical formation of field emitters, particularly useful in the fabrication of flat panel displays. The fabrication involves field emitting points in a gated field emitter structure. Metal field emitters are formed by electroplating and the shape of the formed emitter is controlled by the potential imposed on the gate as well as on a separate counter electrode. This allows sharp emitters to be formed in a more inexpensive and manufacturable process than vacuum deposition processes used at present. The fabrication process involves etching of the gate metal and the dielectric layer down to the resistor layer, and then electroplating the etched area and forming an electroplated emitter point in the etched area.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

Patent:

Save / Share: