skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Porous silicon structures with high surface area/specific pore size

Abstract

Fabrication and use of porous silicon structures to increase surface area of heated reaction chambers, electrophoresis devices, and thermopneumatic sensor-actuators, chemical preconcentrates, and filtering or control flow devices. In particular, such high surface area or specific pore size porous silicon structures will be useful in significantly augmenting the adsorption, vaporization, desorption, condensation and flow of liquids and gasses in applications that use such processes on a miniature scale. Examples that will benefit from a high surface area, porous silicon structure include sample preconcentrators that are designed to adsorb and subsequently desorb specific chemical species from a sample background; chemical reaction chambers with enhanced surface reaction rates; and sensor-actuator chamber devices with increased pressure for thermopneumatic actuation of integrated membranes. Examples that benefit from specific pore sized porous silicon are chemical/biological filters and thermally-activated flow devices with active or adjacent surfaces such as electrodes or heaters.

Inventors:
 [1];  [2];  [3]
  1. Berkeley, CA
  2. Antioch, CA
  3. Danville, CA
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
872190
Patent Number(s):
5882496
Assignee:
Regents of University of California (Oakland, CA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01L - CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
porous; silicon; structures; surface; specific; pore; size; fabrication; increase; heated; reaction; chambers; electrophoresis; devices; thermopneumatic; sensor-actuators; chemical; preconcentrates; filtering; control; flow; particular; useful; significantly; augmenting; adsorption; vaporization; desorption; condensation; liquids; gasses; applications; processes; miniature; scale; examples; benefit; structure; sample; preconcentrators; designed; adsorb; subsequently; desorb; species; background; enhanced; rates; sensor-actuator; chamber; increased; pressure; actuation; integrated; membranes; sized; biological; filters; thermally-activated; active; adjacent; surfaces; electrodes; heaters; reaction chambers; silicon structures; chamber device; specific pore; reaction rate; porous silicon; reaction chamber; chemical species; chemical reaction; pore size; chemical specie; control flow; adjacent surfaces; reaction rates; silicon structure; flow devices; surface reaction; increased pressure; enhanced surface; heated reaction; subsequently desorb; thermopneumatic sensor-actuators; increase surface; electrophoresis devices; electrophoresis device; /204/55/96/210/

Citation Formats

Northrup, M Allen, Yu, Conrad M, and Raley, Norman F. Porous silicon structures with high surface area/specific pore size. United States: N. p., 1999. Web.
Northrup, M Allen, Yu, Conrad M, & Raley, Norman F. Porous silicon structures with high surface area/specific pore size. United States.
Northrup, M Allen, Yu, Conrad M, and Raley, Norman F. Fri . "Porous silicon structures with high surface area/specific pore size". United States. https://www.osti.gov/servlets/purl/872190.
@article{osti_872190,
title = {Porous silicon structures with high surface area/specific pore size},
author = {Northrup, M Allen and Yu, Conrad M and Raley, Norman F},
abstractNote = {Fabrication and use of porous silicon structures to increase surface area of heated reaction chambers, electrophoresis devices, and thermopneumatic sensor-actuators, chemical preconcentrates, and filtering or control flow devices. In particular, such high surface area or specific pore size porous silicon structures will be useful in significantly augmenting the adsorption, vaporization, desorption, condensation and flow of liquids and gasses in applications that use such processes on a miniature scale. Examples that will benefit from a high surface area, porous silicon structure include sample preconcentrators that are designed to adsorb and subsequently desorb specific chemical species from a sample background; chemical reaction chambers with enhanced surface reaction rates; and sensor-actuator chamber devices with increased pressure for thermopneumatic actuation of integrated membranes. Examples that benefit from specific pore sized porous silicon are chemical/biological filters and thermally-activated flow devices with active or adjacent surfaces such as electrodes or heaters.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

Patent:

Save / Share: