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Title: Micromachined chemical jet dispenser

Abstract

A dispenser for chemical fluid samples that need to be precisely ejected in size, location, and time. The dispenser is a micro-electro-mechanical systems (MEMS) device fabricated in a bonded silicon wafer and a substrate, such as glass or silicon, using integrated circuit-like fabrication technology which is amenable to mass production. The dispensing is actuated by ultrasonic transducers that efficiently produce a pressure wave in capillaries that contain the chemicals. The 10-200 .mu.m diameter capillaries can be arranged to focus in one spot or may be arranged in a larger dense linear array (.about.200 capillaries). The dispenser is analogous to some ink jet print heads for computer printers but the fluid is not heated, thus not damaging certain samples. Major applications are in biological sample handling and in analytical chemical procedures such as environmental sample analysis, medical lab analysis, or molecular biology chemistry experiments.

Inventors:
 [1]
  1. (Livermore, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
872177
Patent Number(s):
5877580
Application Number:
08/772639
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
micromachined; chemical; jet; dispenser; fluid; samples; precisely; ejected; size; location; time; micro-electro-mechanical; systems; mems; device; fabricated; bonded; silicon; wafer; substrate; glass; integrated; circuit-like; fabrication; technology; amenable; mass; production; dispensing; actuated; ultrasonic; transducers; efficiently; produce; pressure; wave; capillaries; contain; chemicals; 10-200; diameter; arranged; focus; spot; larger; dense; linear; array; 200; analogous; print; heads; computer; printers; heated; damaging; major; applications; biological; sample; handling; analytical; procedures; environmental; analysis; medical; lab; molecular; biology; chemistry; experiments; environmental sample; fluid sample; linear array; ultrasonic transducer; integrated circuit; silicon wafer; fluid samples; ultrasonic transducers; pressure wave; sample analysis; biological sample; mass production; mechanical systems; device fabricated; chemical procedures; chemical procedure; bonded silicon; /310/

Citation Formats

Swierkowski, Steve P. Micromachined chemical jet dispenser. United States: N. p., 1999. Web.
Swierkowski, Steve P. Micromachined chemical jet dispenser. United States.
Swierkowski, Steve P. Tue . "Micromachined chemical jet dispenser". United States. https://www.osti.gov/servlets/purl/872177.
@article{osti_872177,
title = {Micromachined chemical jet dispenser},
author = {Swierkowski, Steve P.},
abstractNote = {A dispenser for chemical fluid samples that need to be precisely ejected in size, location, and time. The dispenser is a micro-electro-mechanical systems (MEMS) device fabricated in a bonded silicon wafer and a substrate, such as glass or silicon, using integrated circuit-like fabrication technology which is amenable to mass production. The dispensing is actuated by ultrasonic transducers that efficiently produce a pressure wave in capillaries that contain the chemicals. The 10-200 .mu.m diameter capillaries can be arranged to focus in one spot or may be arranged in a larger dense linear array (.about.200 capillaries). The dispenser is analogous to some ink jet print heads for computer printers but the fluid is not heated, thus not damaging certain samples. Major applications are in biological sample handling and in analytical chemical procedures such as environmental sample analysis, medical lab analysis, or molecular biology chemistry experiments.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {3}
}

Patent:

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