Surface treatment of ceramic articles
Abstract
A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.
- Inventors:
-
- Orinda, CA
- Berkeley, CA
- Daly City, CA
- Albany, CA
- Morgan Hill, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 872052
- Patent Number(s):
- 5851475
- Assignee:
- Regents of University of California (Oakland, CA); IBM (San Jose, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- surface; treatment; ceramic; articles; process; producing; article; improved; properties; including; providing; placing; conductive; substrate; holder; hermetic; enclosure; thereafter; pressure; ambient; provided; plasma; solid; materials; produced; partially; immersed; macroparticle; free; region; bias; biased; voltage; material; condenses; negative; implanted; negative voltage; substrate holder; conductive substrate; ceramic article; solid materials; solid material; surface properties; ceramic articles; properties including; surface treatment; plasma including; partially immersed; ceramic surface; free region; improved ceramic; /264/
Citation Formats
Komvopoulos, Kyriakos, Brown, Ian G, Wei, Bo, Anders, Simone, Anders, Andre, and Bhatia, C Singh. Surface treatment of ceramic articles. United States: N. p., 1998.
Web.
Komvopoulos, Kyriakos, Brown, Ian G, Wei, Bo, Anders, Simone, Anders, Andre, & Bhatia, C Singh. Surface treatment of ceramic articles. United States.
Komvopoulos, Kyriakos, Brown, Ian G, Wei, Bo, Anders, Simone, Anders, Andre, and Bhatia, C Singh. Thu .
"Surface treatment of ceramic articles". United States. https://www.osti.gov/servlets/purl/872052.
@article{osti_872052,
title = {Surface treatment of ceramic articles},
author = {Komvopoulos, Kyriakos and Brown, Ian G and Wei, Bo and Anders, Simone and Anders, Andre and Bhatia, C Singh},
abstractNote = {A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}
Works referenced in this record:
Plasma synthesis of metallic and composite thin films with atomically mixed substrate bonding
journal, January 1993
- Brown, I. G.; Anders, A.; Anders, S.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 80-81
Macroparticle‐free thin films produced by an efficient vacuum arc deposition technique
journal, September 1993
- Anders, Simone; Anders, André; Brown, Ian
- Journal of Applied Physics, Vol. 74, Issue 6
Novel metal ion surface modification technique
journal, April 1991
- Brown, I. G.; Godechot, X.; Yu, K. M.
- Applied Physics Letters, Vol. 58, Issue 13
Joining of Metal Films to Carbon-Carbon Composite Material by Metal Plasma Immersion Ion Implantation
journal, January 1993
- Anders, André; Anders, Simone; Brown, Ian G.
- MRS Proceedings, Vol. 314
Low Energy Ion Implantation / Deposition as a Film Synthesis and Bonding Tool
journal, January 1993
- Anders, André; Anders, Simons; Brown, Ian G.
- MRS Proceedings, Vol. 316