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Title: Surface treatment of ceramic articles

Abstract

A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.

Inventors:
 [1];  [2];  [3];  [4];  [4];  [5]
  1. (Orinda, CA)
  2. (Berkeley, CA)
  3. (Daly City, CA)
  4. (Albany, CA)
  5. (Morgan Hill, CA)
Issue Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
OSTI Identifier:
872052
Patent Number(s):
5851475
Assignee:
Regents of University of California (Oakland, CA); IBM (San Jose, CA) LBNL
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
surface; treatment; ceramic; articles; process; producing; article; improved; properties; including; providing; placing; conductive; substrate; holder; hermetic; enclosure; thereafter; pressure; ambient; provided; plasma; solid; materials; produced; partially; immersed; macroparticle; free; region; bias; biased; voltage; material; condenses; negative; implanted; negative voltage; substrate holder; conductive substrate; ceramic article; solid materials; solid material; surface properties; ceramic articles; properties including; surface treatment; plasma including; partially immersed; ceramic surface; free region; improved ceramic; /264/

Citation Formats

Komvopoulos, Kyriakos, Brown, Ian G., Wei, Bo, Anders, Simone, Anders, Andre, and Bhatia, C. Singh. Surface treatment of ceramic articles. United States: N. p., 1998. Web.
Komvopoulos, Kyriakos, Brown, Ian G., Wei, Bo, Anders, Simone, Anders, Andre, & Bhatia, C. Singh. Surface treatment of ceramic articles. United States.
Komvopoulos, Kyriakos, Brown, Ian G., Wei, Bo, Anders, Simone, Anders, Andre, and Bhatia, C. Singh. Thu . "Surface treatment of ceramic articles". United States. https://www.osti.gov/servlets/purl/872052.
@article{osti_872052,
title = {Surface treatment of ceramic articles},
author = {Komvopoulos, Kyriakos and Brown, Ian G. and Wei, Bo and Anders, Simone and Anders, Andre and Bhatia, C. Singh},
abstractNote = {A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

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