skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Surface treatment of ceramic articles

Abstract

A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.

Inventors:
 [1];  [2];  [3];  [4];  [4];  [5]
  1. Orinda, CA
  2. Berkeley, CA
  3. Daly City, CA
  4. Albany, CA
  5. Morgan Hill, CA
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
OSTI Identifier:
872052
Patent Number(s):
5851475
Assignee:
Regents of University of California (Oakland, CA); IBM (San Jose, CA)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
G - PHYSICS G11 - INFORMATION STORAGE G11B - INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
surface; treatment; ceramic; articles; process; producing; article; improved; properties; including; providing; placing; conductive; substrate; holder; hermetic; enclosure; thereafter; pressure; ambient; provided; plasma; solid; materials; produced; partially; immersed; macroparticle; free; region; bias; biased; voltage; material; condenses; negative; implanted; negative voltage; substrate holder; conductive substrate; ceramic article; solid materials; solid material; surface properties; ceramic articles; properties including; surface treatment; plasma including; partially immersed; ceramic surface; free region; improved ceramic; /264/

Citation Formats

Komvopoulos, Kyriakos, Brown, Ian G, Wei, Bo, Anders, Simone, Anders, Andre, and Bhatia, C Singh. Surface treatment of ceramic articles. United States: N. p., 1998. Web.
Komvopoulos, Kyriakos, Brown, Ian G, Wei, Bo, Anders, Simone, Anders, Andre, & Bhatia, C Singh. Surface treatment of ceramic articles. United States.
Komvopoulos, Kyriakos, Brown, Ian G, Wei, Bo, Anders, Simone, Anders, Andre, and Bhatia, C Singh. Thu . "Surface treatment of ceramic articles". United States. https://www.osti.gov/servlets/purl/872052.
@article{osti_872052,
title = {Surface treatment of ceramic articles},
author = {Komvopoulos, Kyriakos and Brown, Ian G and Wei, Bo and Anders, Simone and Anders, Andre and Bhatia, C Singh},
abstractNote = {A process for producing an article with improved ceramic surface properties including providing an article having a ceramic surface, and placing the article onto a conductive substrate holder in a hermetic enclosure. Thereafter a low pressure ambient is provided in the hermetic enclosure. A plasma including ions of solid materials is produced the ceramic surface of the article being at least partially immersed in a macroparticle free region of the plasma. While the article is immersed in the macroparticle free region, a bias of the substrate holder is biased between a low voltage at which material from the plasma condenses on the surface of the article and a high negative voltage at which ions from the plasma are implanted into the article.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

Patent:

Save / Share:

Works referenced in this record:

Plasma synthesis of metallic and composite thin films with atomically mixed substrate bonding
journal, January 1993


Macroparticle‐free thin films produced by an efficient vacuum arc deposition technique
journal, September 1993


Novel metal ion surface modification technique
journal, April 1991


Joining of Metal Films to Carbon-Carbon Composite Material by Metal Plasma Immersion Ion Implantation
journal, January 1993


Low Energy Ion Implantation / Deposition as a Film Synthesis and Bonding Tool
journal, January 1993