Diamond film growth argon-carbon plasmas

Gruen, Dieter M; Krauss, Alan R; Liu, Shengzhong; Pan, Xianzheng; Zuiker, Christopher D

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Title: Diamond film growth argon-carbon plasmas

Abstract

A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.

Inventors:

Gruen, Dieter M ^[1]; Krauss, Alan R ^[2]; Liu, Shengzhong ^[3]; Pan, Xianzheng ^[4]; Zuiker, Christopher D ^[5]

Downers Grove, IL
Naperville, IL
Canton, MI
Wuhan Hubei, CN
LaGrange, IL

Issue Date:: Thu Jan 01 00:00:00 EST 1998

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States)

OSTI Identifier:: 872038

Patent Number(s):: 5849079

Assignee:: University of Chicago (Chicago, IL)

Patent Classifications (CPCs):: C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

Show more

C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
C01B32/25 - Diamond
C01B32/26 - Preparation

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/0605 - {Carbon}
C23C14/0611 - {Diamond}
C23C14/221 - {Ion beam deposition
C23C16/27 - Diamond only
C23C16/274 - {using microwave discharges}
C23C16/277 - {using other elements in the gas phase besides carbon and hydrogen
C23C16/4481 - {by evaporation using carrier gas in contact with the source material

C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
C30B23/00 - Single-crystal growth by condensing evaporated or sublimed materials
C30B23/002 - {Controlling or regulating}
C30B23/02 - Epitaxial-layer growth
C30B25/105 - {by irradiation or electric discharge}
C30B29/04 - Diamond
C30B29/605 - {Products containing multiple oriented crystallites, e.g. columnar crystallites}
C30B33/00 - After-treatment of single crystals or homogeneous polycrystalline material with defined structure

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J9/025 - {of field emission cathodes}

Show less

DOE Contract Number:: W-31109-ENG-38

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: diamond; film; growth; argon-carbon; plasmas; method; manufacturing; involves; forming; carbonaceous; vapor; providing; gas; stream; argon; hydrogen; hydrocarbon; combining; passing; combined; carrier; chamber; plasma; causing; fragmentation; deposition; substrate; film growth; method involves; gas stream; diamond film; involves forming; carbonaceous vapor; carrier stream; causing fragmentation; chamber causing; method involve; gas carrier; manufacturing diamond; /117/423/427/

Citation Formats


                    Gruen, Dieter M, Krauss, Alan R, Liu, Shengzhong, Pan, Xianzheng, and Zuiker, Christopher D. Diamond film growth argon-carbon plasmas.  United States: N. p., 1998. 
        Web.

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                    Gruen, Dieter M, Krauss, Alan R, Liu, Shengzhong, Pan, Xianzheng, & Zuiker, Christopher D. Diamond film growth argon-carbon plasmas.  United States.

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                    Gruen, Dieter M, Krauss, Alan R, Liu, Shengzhong, Pan, Xianzheng, and Zuiker, Christopher D. Thu .  
        "Diamond film growth argon-carbon plasmas".  United States.  https://www.osti.gov/servlets/purl/872038.

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@article{osti_872038,

  title        = {Diamond film growth argon-carbon plasmas},

  author       = {Gruen, Dieter M and Krauss, Alan R and Liu, Shengzhong and Pan, Xianzheng and Zuiker, Christopher D},

  abstractNote = {A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Thu Jan 01 00:00:00 EST 1998},

  month        = {Thu Jan 01 00:00:00 EST 1998}

}

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Works referenced in this record:

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Nature, Vol. 354, Issue 6351
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Near specular reflection of C60 ions in collisions with an HOPG graphite surface
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Nucleation of diamond films on surfaces using carbon clusters
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Fabrication of a diamond field emitter array
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Triplet states of fullerenes C60 and C70. Electron paramagnetic resonance spectra, photophysics, and electronic structures
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Wasielewski, Michael R.; O'Neil, Michael P.; Lykke, Keith R.
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High-yield synthesis, separation, and mass-spectrometric characterization of fullerenes C60 to C266
journal, September 1991

Parker, Deborah Holmes; Wurz, Peter; Chatterjee, Kuntal
Journal of the American Chemical Society, Vol. 113, Issue 20
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Superconductivity at 28.6 K in a rubidium-C60 fullerene compound, RbxC60, synthesized by a solution-phase technique
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Wang, H. Hau; Kini, Aravinda M.; Savall, Brad M.
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Similar Records

Title: Diamond film growth argon-carbon plasmas

Abstract

Citation Formats

Activated C70 and diamond journal, November 1991

Near specular reflection of C60 ions in collisions with an HOPG graphite surface journal, December 1991

Spectrometric Characterization of Purified C 60 and C 70 journal, January 1990

First easily reproduced solution-phase synthesis and confirmation of superconductivity in the fullerene KxC60 (Tc = 18.0 .+-. 0.1 K) journal, July 1991

Nucleation of diamond films on surfaces using carbon clusters journal, December 1991

Fabrication of a diamond field emitter array journal, May 1994

Metastable Growth of Diamond and Diamond-Like Phases journal, August 1991

Crushing C60 to diamond at room temperature journal, January 1992

Growth mechanism of vapor-deposited diamond journal, February 1988

Free-standing diamond membranes: optical, morphological and mechanical properties journal, April 1992

C60: Buckminsterfullerene journal, September 1991

Triplet states of fullerenes C60 and C70. Electron paramagnetic resonance spectra, photophysics, and electronic structures journal, March 1991

High-yield synthesis, separation, and mass-spectrometric characterization of fullerenes C60 to C266 journal, September 1991

Superconductivity at 28.6 K in a rubidium-C60 fullerene compound, RbxC60, synthesized by a solution-phase technique journal, July 1991

Laser deposition of carbon clusters on surfaces: A new approach to the study of Fullerenes journal, December 1990

Fullerenes journal, October 1991

Delayed electron emission from photoexcited C 60 journal, November 1991

When Diamonds Met Buckyballs journal, November 1991

Diamond Film Semiconductors journal, October 1992

Resilience of all-carbon molecules C60, C70, and C84: a surface-scattering time-of-flight investigation journal, October 1991

Solid C60: a new form of carbon journal, September 1990

Activated C70 and diamond
journal, November 1991

Near specular reflection of C60 ions in collisions with an HOPG graphite surface
journal, December 1991

Spectrometric Characterization of Purified C ₆₀ and C ₇₀
journal, January 1990

First easily reproduced solution-phase synthesis and confirmation of superconductivity in the fullerene KxC60 (Tc = 18.0 .+-. 0.1 K)
journal, July 1991

Nucleation of diamond films on surfaces using carbon clusters
journal, December 1991

Fabrication of a diamond field emitter array
journal, May 1994

Metastable Growth of Diamond and Diamond-Like Phases
journal, August 1991

Crushing C60 to diamond at room temperature
journal, January 1992

Growth mechanism of vapor-deposited diamond
journal, February 1988

Free-standing diamond membranes: optical, morphological and mechanical properties
journal, April 1992

C60: Buckminsterfullerene
journal, September 1991

Triplet states of fullerenes C60 and C70. Electron paramagnetic resonance spectra, photophysics, and electronic structures
journal, March 1991

High-yield synthesis, separation, and mass-spectrometric characterization of fullerenes C60 to C266
journal, September 1991

Superconductivity at 28.6 K in a rubidium-C60 fullerene compound, RbxC60, synthesized by a solution-phase technique
journal, July 1991

Laser deposition of carbon clusters on surfaces: A new approach to the study of Fullerenes
journal, December 1990

Fullerenes
journal, October 1991

Delayed electron emission from photoexcited C ₆₀
journal, November 1991

When Diamonds Met Buckyballs
journal, November 1991

Diamond Film Semiconductors
journal, October 1992

Resilience of all-carbon molecules C60, C70, and C84: a surface-scattering time-of-flight investigation
journal, October 1991

Solid C60: a new form of carbon
journal, September 1990