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Title: Diamond film growth argon-carbon plasmas

Abstract

A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.

Inventors:
 [1];  [2];  [3];  [4];  [5]
+ Show Inventor Affiliations
  1. (Downers Grove, IL)
  2. (Naperville, IL)
  3. (Canton, MI)
  4. (Wuhan Hubei, CN)
  5. (LaGrange, IL)
Issue Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL
OSTI Identifier:
872038
Patent Number(s):
5849079
Assignee:
University of Chicago (Chicago, IL) ANL
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
diamond; film; growth; argon-carbon; plasmas; method; manufacturing; involves; forming; carbonaceous; vapor; providing; gas; stream; argon; hydrogen; hydrocarbon; combining; passing; combined; carrier; chamber; plasma; causing; fragmentation; deposition; substrate; film growth; method involves; gas stream; diamond film; involves forming; carbonaceous vapor; carrier stream; causing fragmentation; chamber causing; method involve; gas carrier; manufacturing diamond; /117/423/427/

Citation Formats

Gruen, Dieter M., Krauss, Alan R., Liu, Shengzhong, Pan, Xianzheng, and Zuiker, Christopher D. Diamond film growth argon-carbon plasmas. United States: N. p., 1998. Web.
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Gruen, Dieter M., Krauss, Alan R., Liu, Shengzhong, Pan, Xianzheng, & Zuiker, Christopher D. Diamond film growth argon-carbon plasmas. United States.
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Gruen, Dieter M., Krauss, Alan R., Liu, Shengzhong, Pan, Xianzheng, and Zuiker, Christopher D. Thu . "Diamond film growth argon-carbon plasmas". United States. https://www.osti.gov/servlets/purl/872038.
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@article{osti_872038,
title = {Diamond film growth argon-carbon plasmas},
author = {Gruen, Dieter M. and Krauss, Alan R. and Liu, Shengzhong and Pan, Xianzheng and Zuiker, Christopher D.},
abstractNote = {A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}
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