Diamond film growth argon-carbon plasmas
Abstract
A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.
- Inventors:
-
- Downers Grove, IL
- Naperville, IL
- Canton, MI
- Wuhan Hubei, CN
- LaGrange, IL
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL
- OSTI Identifier:
- 872038
- Patent Number(s):
- 5849079
- Assignee:
- University of Chicago (Chicago, IL)
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- diamond; film; growth; argon-carbon; plasmas; method; manufacturing; involves; forming; carbonaceous; vapor; providing; gas; stream; argon; hydrogen; hydrocarbon; combining; passing; combined; carrier; chamber; plasma; causing; fragmentation; deposition; substrate; film growth; method involves; gas stream; diamond film; involves forming; carbonaceous vapor; carrier stream; causing fragmentation; chamber causing; method involve; gas carrier; manufacturing diamond; /117/423/427/
Citation Formats
Gruen, Dieter M, Krauss, Alan R, Liu, Shengzhong, Pan, Xianzheng, and Zuiker, Christopher D. Diamond film growth argon-carbon plasmas. United States: N. p., 1998.
Web.
Gruen, Dieter M, Krauss, Alan R, Liu, Shengzhong, Pan, Xianzheng, & Zuiker, Christopher D. Diamond film growth argon-carbon plasmas. United States.
Gruen, Dieter M, Krauss, Alan R, Liu, Shengzhong, Pan, Xianzheng, and Zuiker, Christopher D. Thu .
"Diamond film growth argon-carbon plasmas". United States. https://www.osti.gov/servlets/purl/872038.
@article{osti_872038,
title = {Diamond film growth argon-carbon plasmas},
author = {Gruen, Dieter M and Krauss, Alan R and Liu, Shengzhong and Pan, Xianzheng and Zuiker, Christopher D},
abstractNote = {A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}
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