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Title: Miniature pulsed vacuum arc plasma gun and apparatus for thin-film fabrication

Abstract

A miniature (dime-size in cross-section) vapor vacuum arc plasma gun is described for use in an apparatus to produce thin films. Any conductive material can be layered as a film on virtually any substrate. Because the entire apparatus can easily be contained in a small vacuum chamber, multiple dissimilar layers can be applied without risk of additional contamination. The invention has special applications in semiconductor manufacturing.

Inventors:
 [1];  [2];  [3];  [4];  [4]
  1. Berkeley, CA
  2. Richmond, CA
  3. Emmeryville, CA
  4. El Cerrito, CA
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
OSTI Identifier:
871998
Patent Number(s):
5841236
Assignee:
Regents of University of California (Oakland, CA)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
miniature; pulsed; vacuum; plasma; gun; apparatus; thin-film; fabrication; dime-size; cross-section; vapor; described; produce; films; conductive; material; layered; film; virtually; substrate; entire; easily; contained; chamber; multiple; dissimilar; layers; applied; risk; additional; contamination; special; applications; semiconductor; manufacturing; vacuum chamber; conductive material; plasma gun; vapor vacuum; semiconductor manufacturing; special applications; special application; dissimilar layers; /315/204/

Citation Formats

Brown, Ian G, MacGill, Robert A, Galvin, James E, Ogletree, David F, and Salmeron, Miquel. Miniature pulsed vacuum arc plasma gun and apparatus for thin-film fabrication. United States: N. p., 1998. Web.
Brown, Ian G, MacGill, Robert A, Galvin, James E, Ogletree, David F, & Salmeron, Miquel. Miniature pulsed vacuum arc plasma gun and apparatus for thin-film fabrication. United States.
Brown, Ian G, MacGill, Robert A, Galvin, James E, Ogletree, David F, and Salmeron, Miquel. Thu . "Miniature pulsed vacuum arc plasma gun and apparatus for thin-film fabrication". United States. https://www.osti.gov/servlets/purl/871998.
@article{osti_871998,
title = {Miniature pulsed vacuum arc plasma gun and apparatus for thin-film fabrication},
author = {Brown, Ian G and MacGill, Robert A and Galvin, James E and Ogletree, David F and Salmeron, Miquel},
abstractNote = {A miniature (dime-size in cross-section) vapor vacuum arc plasma gun is described for use in an apparatus to produce thin films. Any conductive material can be layered as a film on virtually any substrate. Because the entire apparatus can easily be contained in a small vacuum chamber, multiple dissimilar layers can be applied without risk of additional contamination. The invention has special applications in semiconductor manufacturing.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

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