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Title: Calorimetric gas sensor

Abstract

A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. The filaments tested to date are 2 .mu.m thick.times.10 .mu.m wide.times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500.degree. C.; Pt deposits only on the hot filament. Using a constant-resistance-mode feedback circuit, Pt-coated filaments operating at ca. 300.degree. C. (35 mW input power) respond linearly, in terms of the change in supply current required to maintain constant resistance (temperature), to H.sub.2 concentrations between 100 ppm and 1% in an 80/20 N.sub.2 /O.sub.2 mixture. Other catalytic materials can also be used.

Inventors:
 [1];  [2];  [1];  [1];  [1];  [3];  [4]
  1. (Albuquerque, NM)
  2. (Cedar Crest, NM)
  3. (Brookline, MA)
  4. (Bountiful, UT)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
871967
Patent Number(s):
5834627
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
calorimetric; gas; sensor; combustible; resistively; heated; noble; metal-coated; micromachined; polycrystalline; filament; calorimetrically; detect; presence; concentration; gases; filaments; tested; date; thick; times; 10; wide; 100; 250; 500; 1000; m-long; overcoated; 25; m-thick; protective; cvd; layer; catalytic; film; deposited; precursor; acac; microfilaments; approximately; degree; deposits; hot; constant-resistance-mode; feedback; circuit; pt-coated; operating; 300; 35; mw; input; power; respond; linearly; terms; change; supply; current; required; maintain; constant; resistance; temperature; concentrations; ppm; 80; 20; mixture; materials; combustible gases; feedback circuit; input power; noble metal; combustible gas; catalytic material; gas sensor; hot filament; resistively heated; catalytic materials; noble metal-coated; micromachined polycrystalline; maintain constant; filaments tested; calorimetrically detect; /73/422/

Citation Formats

Ricco, Antonio J., Hughes, Robert C., Smith, James H., Moreno, Daniel J., Manginell, Ronald P., Senturia, Stephen D., and Huber, Robert J. Calorimetric gas sensor. United States: N. p., 1998. Web.
Ricco, Antonio J., Hughes, Robert C., Smith, James H., Moreno, Daniel J., Manginell, Ronald P., Senturia, Stephen D., & Huber, Robert J. Calorimetric gas sensor. United States.
Ricco, Antonio J., Hughes, Robert C., Smith, James H., Moreno, Daniel J., Manginell, Ronald P., Senturia, Stephen D., and Huber, Robert J. Thu . "Calorimetric gas sensor". United States. https://www.osti.gov/servlets/purl/871967.
@article{osti_871967,
title = {Calorimetric gas sensor},
author = {Ricco, Antonio J. and Hughes, Robert C. and Smith, James H. and Moreno, Daniel J. and Manginell, Ronald P. and Senturia, Stephen D. and Huber, Robert J.},
abstractNote = {A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. The filaments tested to date are 2 .mu.m thick.times.10 .mu.m wide.times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500.degree. C.; Pt deposits only on the hot filament. Using a constant-resistance-mode feedback circuit, Pt-coated filaments operating at ca. 300.degree. C. (35 mW input power) respond linearly, in terms of the change in supply current required to maintain constant resistance (temperature), to H.sub.2 concentrations between 100 ppm and 1% in an 80/20 N.sub.2 /O.sub.2 mixture. Other catalytic materials can also be used.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

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