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Title: Multi-layer carbon-based coatings for field emission

Abstract

A multi-layer resistive carbon film field emitter device for cold cathode field emission applications. The multi-layered film of the present invention consists of at least two layers of a conductive carbon material, preferably amorphous-tetrahedrally coordinated carbon, where the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure can be a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film can be a plurality of carbon layers, where adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced.

Inventors:
 [1];  [1]
  1. (Albuquerque, NM)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
871903
Patent Number(s):
5821680
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
multi-layer; carbon-based; coatings; field; emission; resistive; carbon; film; emitter; device; cold; cathode; applications; multi-layered; consists; layers; conductive; material; preferably; amorphous-tetrahedrally; coordinated; resistivities; adjacent; electron; surface; preferred; structure; top; layer; resistivity; bottom; edge; emitting; structures; plurality; selection; deposition; conditions; including; energy; depositing; species; presence; absence; elements; inert; gases; boron; desired; produced; inert gases; electron emission; cold cathode; top layer; inert gas; field emission; carbon film; field emitter; carbon layer; carbon material; adjacent layers; resistive carbon; depositing carbon; conductive carbon; carbon species; multi-layered film; multi-layer resistive; multi-layer carbon-based; cathode field; film field; deposition conditions; emitter device; emission applications; carbon-based coatings; coordinated carbon; /313/

Citation Formats

Sullivan, John P., and Friedmann, Thomas A. Multi-layer carbon-based coatings for field emission. United States: N. p., 1998. Web.
Sullivan, John P., & Friedmann, Thomas A. Multi-layer carbon-based coatings for field emission. United States.
Sullivan, John P., and Friedmann, Thomas A. Thu . "Multi-layer carbon-based coatings for field emission". United States. https://www.osti.gov/servlets/purl/871903.
@article{osti_871903,
title = {Multi-layer carbon-based coatings for field emission},
author = {Sullivan, John P. and Friedmann, Thomas A.},
abstractNote = {A multi-layer resistive carbon film field emitter device for cold cathode field emission applications. The multi-layered film of the present invention consists of at least two layers of a conductive carbon material, preferably amorphous-tetrahedrally coordinated carbon, where the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure can be a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film can be a plurality of carbon layers, where adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

Patent:

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