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Title: Transverse-structure electrostatic charged particle beam lens

Abstract

Electrostatic particle-beam lenses using a concentric co-planar array of independently biased rings can be advantageous for some applications. Traditional electrostatic lenses often consist of axial series of biased rings, apertures, or tubes. The science of lens design has devoted much attention to finding axial arrangements that compensate for the substantial optical aberrations of the individual elements. Thus, as with multi-element lenses for light, a multi-element charged-particle lens can have optical behavior that is far superior to that of the individual elements. Transverse multiple-concentric-ring lenses achieve high performance, while also having advantages in terms of compactness and optical versatility.

Inventors:
 [1]
  1. (Pleasanton, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
871901
Patent Number(s):
5821543
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
transverse-structure; electrostatic; charged; particle; beam; lens; particle-beam; lenses; concentric; co-planar; array; independently; biased; rings; advantageous; applications; traditional; consist; axial; series; apertures; tubes; science; design; devoted; attention; finding; arrangements; compensate; substantial; optical; aberrations; individual; elements; multi-element; light; charged-particle; behavior; superior; transverse; multiple-concentric-ring; achieve; performance; advantages; terms; compactness; versatility; particle beam; charged particle; individual elements; electrostatic particle; electrostatic charge; electrostatic lens; element charged; /250/

Citation Formats

Moran, Michael J. Transverse-structure electrostatic charged particle beam lens. United States: N. p., 1998. Web.
Moran, Michael J. Transverse-structure electrostatic charged particle beam lens. United States.
Moran, Michael J. Thu . "Transverse-structure electrostatic charged particle beam lens". United States. https://www.osti.gov/servlets/purl/871901.
@article{osti_871901,
title = {Transverse-structure electrostatic charged particle beam lens},
author = {Moran, Michael J.},
abstractNote = {Electrostatic particle-beam lenses using a concentric co-planar array of independently biased rings can be advantageous for some applications. Traditional electrostatic lenses often consist of axial series of biased rings, apertures, or tubes. The science of lens design has devoted much attention to finding axial arrangements that compensate for the substantial optical aberrations of the individual elements. Thus, as with multi-element lenses for light, a multi-element charged-particle lens can have optical behavior that is far superior to that of the individual elements. Transverse multiple-concentric-ring lenses achieve high performance, while also having advantages in terms of compactness and optical versatility.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

Patent:

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