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Title: Method for localized deposition of noble metal catalysts with control of morphology

Abstract

A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500 .degree. C.; Pt deposits only on the hot filament. The filaments tested to date are 2 .mu.m thick .times.10 .mu.m wide .times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer.

Inventors:
 [1];  [1];  [2]
  1. (Albuquerque, NM)
  2. (Bountiful, UT)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
871890
Patent Number(s):
5820922
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; localized; deposition; noble; metal; catalysts; control; morphology; combustible; gas; sensor; resistively; heated; metal-coated; micromachined; polycrystalline; filament; calorimetrically; detect; presence; concentration; gases; catalytic; film; deposited; cvd; precursor; acac; microfilaments; approximately; 500; degree; deposits; hot; filaments; tested; date; thick; times; 10; wide; 100; 250; 1000; m-long; overcoated; 25; m-thick; protective; layer; combustible gases; metal catalysts; noble metal; combustible gas; metal catalyst; gas sensor; hot filament; resistively heated; noble metal-coated; micromachined polycrystalline; filaments tested; calorimetrically detect; /427/

Citation Formats

Ricco, Antonio J., Manginell, Ronald P., and Huber, Robert J. Method for localized deposition of noble metal catalysts with control of morphology. United States: N. p., 1998. Web.
Ricco, Antonio J., Manginell, Ronald P., & Huber, Robert J. Method for localized deposition of noble metal catalysts with control of morphology. United States.
Ricco, Antonio J., Manginell, Ronald P., and Huber, Robert J. Thu . "Method for localized deposition of noble metal catalysts with control of morphology". United States. https://www.osti.gov/servlets/purl/871890.
@article{osti_871890,
title = {Method for localized deposition of noble metal catalysts with control of morphology},
author = {Ricco, Antonio J. and Manginell, Ronald P. and Huber, Robert J.},
abstractNote = {A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500 .degree. C.; Pt deposits only on the hot filament. The filaments tested to date are 2 .mu.m thick .times.10 .mu.m wide .times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

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